학술논문
'학술논문'
에서 검색결과 17건 | 목록
1~10
Conference
Weber, O.; Josse, E.; Andrieu, F.; Cros, A.; Richard, E.; Perreau, P.; Baylac, E.; Degors, N.; Gallon, C.; Perrin, E.; Chhun, S.; Petitprez, E.; Delmedico, S.; Simon, J.; Druais, G.; Lasserre, S.; Mazurier, J.; Guillot, N.; Bernard, E.; Bianchini, R.; Parmigiani, L.; Gerard, X.; Pribat, C.; Gourhant, O.; Abbate, F.; Gaumer, C.; Beugin, V.; Gouraud, P.; Maury, P.; Lagrasta, S.; Barge, D.; Loubet, N.; Beneyton, R.; Benoit, D.; Zoll, S.; Chapon, J.-D.; Babaud, L.; Bidaud, M.; Gregoire, M.; Monget, C.; Le-Gratiet, B.; Brun, P.; Mellier, M.; Pofelski, A.; Clement, L.R.; Bingert, R.; Puget, S.; Kruck, J.-F.; Hoguet, D.; Scheer, P.; Poiroux, T.; Manceau, J.-P.; Rafik, M.; Rideau, D.; Jaud, M.-A.; Lacord, J.; Monsieur, F.; Grenouillet, L.; Vinet, M.; Liu, Q.; Doris, B.; Celik, M.; Fetterolf, S.P.; Faynot, O.; Haond, M.
2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers VLSI Technology (VLSI-Technology): Digest of Technical Papers, 2014 Symposium on. :1-2 Jun, 2014
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2020, 11325)
Conference
Duclaux, B.; Pelletier, A.; De-Caunes, J.; Perrier, R.; Babaud, L.; Gatefait, M.; Fagart, O.; Thivolle, N.; Guerabsi, M.; Chapon, J.-D.; Perrin, B.; Monget, C.
In: ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings , 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019. (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, May 2019, 2019-May)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10585)
Conference
Josse, E.; Cros, A.; Richard, E.; Baylac, E.; Gallon, C.; Perrin, E.; Chhun, S.; Petitprez, E.; Delmedico, S.; Druais, G.; Guillot, N.; Bernard, E.; Bianchini, R.; Parmigiani, L.; Gerard, X.; Pribat, C.; Gourhant, O.; Abbate, F.; Gaumer, C.; Gouraud, P.; Maury, P.; Lagrasta, S.; Barge, D.; Loubet, N.; Beneyton, R.; Benoit, D.; Zoll, S.; Chapon, J.-D.; Babaud, L.; Bidaud, M.; Gregoire, M.; Monget, C.; Le-Gratiet, B.; Mellier, M.; Pofelski, A.; Clement, L.R.; Bingert, R.; Puget, S.; Kruck, J.-F.; Hoguet, D.; Scheer, P.; Rafik, M.; Rideau, D.; Lacord, J.; Monsieur, F.; Liu, Q.; Celik, M.; Haon, M.; Weber, O.; Andrieu, F.; Perreau, P.; Mazurier, J.; Beugin, V.; Brun, P.; Poiroux, T.; Jaud, M.-A.; Grenouillet, L.; Vinet, M.; Faynot, O.; Degors, N.; Simon, J.; Lasserre, S.; Manceau, J.-P.; Doris, B.; Fetterolf, S.P.
In: Digest of Technical Papers - Symposium on VLSI Technology . (Digest of Technical Papers - Symposium on VLSI Technology, 8 September 2014)
Conference
Le Gratiet, B.; Massin, J.; Ostrovski, A.; Monget, C.; Decaux, M.; Thivolle, N.; Faure, R.; Baron, F.; Chapon, J.-D.; Dabertrand, K.; Sunderman, F.; Gouraud, P.; Babaud, L.; Thevenon, L.; Cluet, N.; Vandewalle, B.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2009, 7272)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 6924)
Conference
Le Gratiet, B.; Gouraud, P.; Aparicio, E.; Babaud, L.; Dabertrand, K.; Touchet, M.; Foussadier, F.; Sundermanna, F.; Massin, J.; Chapon, J.-D.; Gatefait, M.; Minghetti, B.; De-Caunes, J.; Boutin, D.; Chaton, C.; Kremer, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 6922)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XX. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6520(PART 3))
Conference
Urbani, J.-C.; Chapon, J.-D.; Di-Maria, J.-L.; Farys, V.; Foussadier, F.; Kerrien, G.; Martinelli, C.; Planchot, J.; Robert, F.; Sundermann, F.; Vautrin, F.; Belledent, J.; Borjon, A.; Couderc, C.; LeCam, L.; Rody, Y.; Gardin, C.; Montgomery, P.; Morgana, N.; Saied, M.; Wilkinson, B.; Yesilada, E.; Trouiller, Y.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask and Next-Generation Lithography Mask Technology XIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6607(PART 1))
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[AR] Chapon, J.-D.
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