학술논문
'학술논문'
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1~10
Academic Journal
Borjon, A.; Belledent, J.; Couderc, C.; Rody, Y.; Cam, L.L.; Trouiller, Y.; Gardin, C.; Yesilada, E.; Montgomery, P.; Willkinson, B.; Saied, M.; Sundermann, F.; Urbani, J.-C.; Foussadier, F.; Planchot, J.; Martinelli, C.; Kerrien, G.; Vautrin, F.; Robert, F.; Schiavone, P.
In: Microelectronic Engineering , Proceedings of the 32nd International Conference on Micro- and Nano-Engineering. (Microelectronic Engineering, May 2007, 84(5-8):741-745)
Academic Journal
Gardin, C.; Yesilada, E.; Saied, M.; Belledent, J.; Borjon, A.; Couderc, C.; Rody, Y.; Trouiller, Y.; Foussadier, F.; Urbani, J.-C.; Sundermann, F.; Planchot, J.; Robert, F.
In: Microelectronic Engineering , Proceedings of the 32nd International Conference on Micro- and Nano-Engineering. (Microelectronic Engineering, May 2007, 84(5-8):770-773)
Academic Journal
Borjon, A.; Belledent, J.; Couderc, C.; Rody, Y.; Trouiller, Y.; Patterson, K.; Lucas, K.; Gardin, C.; Sundermann, F.; Urbani, J.-C.; Baron, S.; Foussadier, F.; Schiavone, P.
In: Microelectronic Engineering . (Microelectronic Engineering, April 2006, 83 4-9 SPEC. ISS.:1017-1022)
Conference
Saied, M.; Foussadier, F.; Belledent, J.; Trouiller, Y.; Schanen, I.; Gardin, C.; Urbani, J. C.; Montgomery, P. K.; Sundermann, F.; Robert, F.; Couderc, C.; Vautrin, F.; Kerrien, G.; Planchot, J.; Yesilada, E.; Martinelli, C.; Wilkinson, B.; Borjon, A.; Le-Cam, L.; Di-Maria, J. L.
Proceedings of SPIE; Nov2007 Part 2, Issue 1, p65204Q-65204Q-12, 12p
Conference
Rody, Y.; Martin, P.; Couderc, C.; Sixt, P.; Gardin, C.; Lucas, K.; Patterson, K.; Miramond-Collet, C.; Belledent, J.; Boone, R.; Borjon, A.; Trouiller, Y.
Proceedings of SPIE; Nov2005 Part 2, Issue 1, p59920R-59920R-11, 11p
Conference
Trouiller, Y.; Borjon, A.; Belledent, J.; Couderc, C.; Rody, Y.; Cam, L.L.; Farys, V.; Sundermann, F.; Urbani, J.-C.; Planchot, J.; Goirand, P.-J.; Robert, F.; Kerrien, G.; Vautrin, F.; Martinelli, C.; Gardin, C.; Conley, W.; Warrick, S.; Wilkinson, B.; Saied, M.; Yesilada, E.; Montgomery, P.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XX. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6520(PART 1))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XX. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6520(PART 2))
Conference
Saied, M.; Yesilada, E.; Gardin, C.; Wilkinson, B.; Morgana, N.; Foussadier, F.; Urbani, J.C.; Sundermann, F.; Robert, F.; Vautrin, F.; Kerrien, G.; Planchot, J.; Martinelli, C.; Farys, V.; Belledent, J.; Couderc, C.; LeCam, L.; Rody, Y.; Borjon, A.; Trouiller, Y.; Di-Maria, J.-L.; Schanen, I.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2007. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6730)
Conference
Urbani, J.-C.; Chapon, J.-D.; Di-Maria, J.-L.; Farys, V.; Foussadier, F.; Kerrien, G.; Martinelli, C.; Planchot, J.; Robert, F.; Sundermann, F.; Vautrin, F.; Belledent, J.; Borjon, A.; Couderc, C.; LeCam, L.; Rody, Y.; Gardin, C.; Montgomery, P.; Morgana, N.; Saied, M.; Wilkinson, B.; Yesilada, E.; Trouiller, Y.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask and Next-Generation Lithography Mask Technology XIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6607(PART 1))
Conference
Sundermann, F.; Urbani, J.-C.; Foussadier, F.; Martinelli, C.; Vautrin, F.; Robert, F.; Kerrien, G.; Planchot, J.; Farys, V.; Couderc, C.; Belledent, J.; Borjon, A.; LeCam, L.; Rody, Y.; Gardin, C.; Saied, M.; Yesilada, E.; Wilkinson, B.; Morgana, N.; Montgomery, P.; Trouiller, Y.; Di Maria, J.-L.
In: Proceedings of SPIE - The International Society for Optical Engineering , EMLC 2007: 23rd European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6533)
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[AR] Borjon, A.
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