학술논문
'학술논문'
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Academic Journal
Le-Gratiet, B.; De-Caunes, J.; Gatefait, M.; Lam, A.; Ostrovsky, A.; Planchot, J.; Farys, V.; Ducoté, J.; Mikolajczak, M.; Morin, V.; Chojnowski, N.; Sundermann, F.; Pelletier, A.; Bouyssou, R.; Monget, C.; Chapon, J.D.; Orlando, B.; Babaud, L.; Yesilada, E.; Szucs, A.; Michel, J.-C.; Bengoechea, O.R.; Gouraud, P.; Lapeyre, C.; Desvoivres, L.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 April 2015, 14(2))
Conference
Duclaux, B.; Pelletier, A.; De-Caunes, J.; Perrier, R.; Babaud, L.; Gatefait, M.; Fagart, O.; Thivolle, N.; Guerabsi, M.; Chapon, J.-D.; Perrin, B.; Monget, C.
In: ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings , 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019. (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, May 2019, 2019-May)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8681)
Integration and automation of DoseMapper™ in a logic fab APC system. Application for 45/40/28nm node
Conference
Le-Gratiet, B.; Salagnon, C.; De-Caunes, J.; Mikolajczak, M.; Morin, V.; Chojnowski, N.; Sundermann, F.; Massin, J.; Pelletier, A.; Metz, J.; Bouyssou, R.; Pelissier, A.; Belmont, O.; Strapazzon, A.; Phillips, A.; Devoivre, T.; Bernard, E.; Batail, E.; Thevenon, L.; Bry, B.; Bernard-Granger, F.; Oumina, A.; Baron, M.-P.; Gueze, D.; Blancquaert, Y.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2012, 8324)
Conference
Le Gratiet, B.; Gouraud, P.; Aparicio, E.; Babaud, L.; Dabertrand, K.; Touchet, M.; Foussadier, F.; Sundermanna, F.; Massin, J.; Chapon, J.-D.; Gatefait, M.; Minghetti, B.; De-Caunes, J.; Boutin, D.; Chaton, C.; Kremer, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 6922)
Periodical
Proceedings of SPIE; April 2013, Vol. 8681 Issue: 1 p868117-868117-7
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[AR] De-Caunes, J.
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