학술논문
'학술논문'
에서 검색결과 55건 | 목록
1~10
Conference
Fanton, P.; Lakcher, A.; Le-Gratiet, B.; Simiz, J-G.; Hasan, T.; Prentice, C.; Hunsche, S.; Sen, N.; Greca, R. La; Tien, H.; Depre, L.
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Advanced Semiconductor Manufacturing Conference (ASMC), 2017 28th Annual SEMI. :399-404 May, 2017
Periodical
Proceedings of SPIE; October 2023, Vol. 12802 Issue: 1 p128020P-128020P-11, 12673992p
Conference
Proceedings of SPIE; 2/9/2024, Vol. 12802, p128020P-128020P-11, 1p
Conference
Weber, O.; Josse, E.; Andrieu, F.; Cros, A.; Richard, E.; Perreau, P.; Baylac, E.; Degors, N.; Gallon, C.; Perrin, E.; Chhun, S.; Petitprez, E.; Delmedico, S.; Simon, J.; Druais, G.; Lasserre, S.; Mazurier, J.; Guillot, N.; Bernard, E.; Bianchini, R.; Parmigiani, L.; Gerard, X.; Pribat, C.; Gourhant, O.; Abbate, F.; Gaumer, C.; Beugin, V.; Gouraud, P.; Maury, P.; Lagrasta, S.; Barge, D.; Loubet, N.; Beneyton, R.; Benoit, D.; Zoll, S.; Chapon, J.-D.; Babaud, L.; Bidaud, M.; Gregoire, M.; Monget, C.; Le-Gratiet, B.; Brun, P.; Mellier, M.; Pofelski, A.; Clement, L.R.; Bingert, R.; Puget, S.; Kruck, J.-F.; Hoguet, D.; Scheer, P.; Poiroux, T.; Manceau, J.-P.; Rafik, M.; Rideau, D.; Jaud, M.-A.; Lacord, J.; Monsieur, F.; Grenouillet, L.; Vinet, M.; Liu, Q.; Doris, B.; Celik, M.; Fetterolf, S.P.; Faynot, O.; Haond, M.
2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers VLSI Technology (VLSI-Technology): Digest of Technical Papers, 2014 Symposium on. :1-2 Jun, 2014
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , 38th European Mask and Lithography Conference, EMLC 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12802)
Conference
Soltani, E.; Le-Gratiet, B.; Bérard-Bergery, S.; Bourguignon, T.; Le Pennec, A.; Charras, N.; Pradelles, J.; Tiron, R.
In: Proceedings of SPIE - The International Society for Optical Engineering , 38th European Mask and Lithography Conference, EMLC 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12802)
Conference
Bidal, G.; Boeuf, F.; Denorme, S.; Laviron, C.; Bourdelle, K.; Loubet, N.; Campidelli, Y.; Beneyton, R.; Moriceau, H.; Fournel, F.; Morin, P.; Barnola, S.; Salvetat, T.; Perreau, P.; Gouraud, P.; Leverd, F.; Le-Gratiet, B.; Huguenin, J.L.; Fleury, D.; Kusiaku, K.; Cros, A.; Leyris, C.; Haendler, S.; Borowiak, C.; Clement, L.; Pantel, R.; Ghibaudo, G.; Skotnicki, T.
2009 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2009 IEEE International. :1-4 Dec, 2009
Conference
Fenouillet-Beranger, C.; Perreau, P.; Pham-Nguyen, L.; Denorme, S.; Andrieu, F.; Tosti, L.; Brevard, L.; Weber, O.; Barnola, S.; Salvetat, T.; Garros, X.; Casse, M.; Cassé, M.; Leroux, C.; Noel, J.P; Thomas, O.; Le-Gratiet, B.; Baron, F.; Gatefait, M.; Campidelli, Y.; Abbate, F.; Perrot, C.; de-Buttet, C.; Beneyton, R.; Pinzelli, L.; Leverd, F.; Gouraud, P.; Gros-Jean, M.; Bajolet, A.; Mezzomo, C.; Leyris, C.; Haendler, S.; Noblet, D.; Pantel, R.; Margain, A.; Borowiak, C.; Josse, E.; Planes, N.; Delprat, D.; Boedt, F.; Bourdelle, K.; Nguyen, B.Y.; Boeuf, F.; Faynot, O.; Skotnicki, T.
2009 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2009 IEEE International. :1-4 Dec, 2009
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 October 2022, 21(4))
Conference
Monfray, S.; Huguenin, J.-L.; Martin, M.; Samson, M.-P.; Borowiak, C.; Arvet, C.; Dalemcourt, JF.; Perreau, P.; Barnola, S.; Bidal, G.; Denorme, S.; Campidelli, Y.; Benotmane, K.; Leverd, F.; Gouraud, P.; Le-Gratiet, B.; De-Buttet, C.; Pinzelli, L.; Beneyton, R.; Morel, T.; Wacquez, R.; Bustos, J.; Icard, B.; Pain, L.; Barraud, S.; Ernst, T.; Boeuf, F.; Faynot, O.; Skotnicki, T.
2010 International Electron Devices Meeting Electron Devices Meeting (IEDM), 2010 IEEE International. :11.2.1-11.2.4 Dec, 2010
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제한된 항목
[AR] Le-Gratiet, B.
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