학술논문
'학술논문'
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1~10
Academic Journal
Carrère, J.P.; Oddou, J.P.; Place, S.; Richard, C.; Benoit, D.; Jenny, C.; Gatefait, M.; Aumont, C.; Tournier, A.; Roy, F.
In Solid State Electronics November-December 2011 65-66:51-56
Conference
Carrere, J.P.; Oddou, J.P.; Richard, C.; Jenny, C.; Gatefait, M.; Place, S.; Aumont, C.; Tournier, A.; Roy, F.
2010 Proceedings of the European Solid State Device Research Conference Solid-State Device Research Conference (ESSDERC), 2010 Proceedings of the European. :106-109 Sep, 2010
Conference
Fenouillet-Beranger, C.; Perreau, P.; Pham-Nguyen, L.; Denorme, S.; Andrieu, F.; Tosti, L.; Brevard, L.; Weber, O.; Barnola, S.; Salvetat, T.; Garros, X.; Casse, M.; Cassé, M.; Leroux, C.; Noel, J.P; Thomas, O.; Le-Gratiet, B.; Baron, F.; Gatefait, M.; Campidelli, Y.; Abbate, F.; Perrot, C.; de-Buttet, C.; Beneyton, R.; Pinzelli, L.; Leverd, F.; Gouraud, P.; Gros-Jean, M.; Bajolet, A.; Mezzomo, C.; Leyris, C.; Haendler, S.; Noblet, D.; Pantel, R.; Margain, A.; Borowiak, C.; Josse, E.; Planes, N.; Delprat, D.; Boedt, F.; Bourdelle, K.; Nguyen, B.Y.; Boeuf, F.; Faynot, O.; Skotnicki, T.
2009 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2009 IEEE International. :1-4 Dec, 2009
Academic Journal
Le-Gratiet, B.; De-Caunes, J.; Gatefait, M.; Lam, A.; Ostrovsky, A.; Planchot, J.; Farys, V.; Ducoté, J.; Mikolajczak, M.; Morin, V.; Chojnowski, N.; Sundermann, F.; Pelletier, A.; Bouyssou, R.; Monget, C.; Chapon, J.D.; Orlando, B.; Babaud, L.; Yesilada, E.; Szucs, A.; Michel, J.-C.; Bengoechea, O.R.; Gouraud, P.; Lapeyre, C.; Desvoivres, L.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 April 2015, 14(2))
Academic Journal
Roy, F.; Tournier, A.; Wehbe-Alause, H.; Blanchet, F.; Boulenc, P.; Leverd, F.; Favennec, L.; Perrot, C.; Pinzelli, L.; Gatefait, M.; Cherault, N.; Jeanjean, D.; Carrere, J.P.; Augier, C.; Ricq, S.; Herault, D.; Hulot, S.
In: Physica Status Solidi (C) Current Topics in Solid State Physics . (Physica Status Solidi (C) Current Topics in Solid State Physics, January 2014, 11(1):50-56)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2020, 11325)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2020, 11325)
Conference
Duclaux, B.; Pelletier, A.; De-Caunes, J.; Perrier, R.; Babaud, L.; Gatefait, M.; Fagart, O.; Thivolle, N.; Guerabsi, M.; Chapon, J.-D.; Perrin, B.; Monget, C.
In: ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings , 2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2019. (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, May 2019, 2019-May)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10585)
Conference
Carre?re, J.P.; Oddou, J.P.; Richard, C.; Jenny, C.; Gatefait, M.; Place, S.; Aumont, C.; Tournier, A.; Roy, F.
2010 Proceedings of the European Solid-State Device Research Conference (ESSDERC); 2010, p106-109, 4p
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[AR] Gatefait, M.
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