학술논문
'학술논문'
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Academic Journal
In Microelectronics Journal 2005 36(7):629-633
Academic Journal
Hernandez, M. ; Venturini, J.; Berard, D.; Kerrien, G.; Sarnet, T.; Débarre, D.; Boulmer, J.; Laviron, C.; Camel, D.; Santailler, J.-L.; Akhouayri, H.
In Materials Science & Engineering B 2004 114:105-108
Academic Journal
Hernandez, M.; Venturini, J.; Zahorski, D.; Boulmer, J.; Débarre, D.; Kerrien, G.; Sarnet, T.; Laviron, C.; Semeria, M.N.; Camel, D.; Santailler, J.L.
In Applied Surface Science 2003 208:345-351
Academic Journal
Kerrien, G.; Hernandez, M.; Laviron, C.; Sarnet, T.; Débarre, D.; Noguchi, T.; Zahorski, D.; Venturini, J.; Semeria, M.N.; Boulmer, J.
In Applied Surface Science 2003 208:277-284
Conference
Kakushima, K.; Sarnet, T.; Kerrien, G.; Nagashio, M.; Debarre, D.; Boulmer, J.; Noguchi, T.; Bourouina, T.; Kawakatsu, H.; Fujita, H.
TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) Solid-state sensors, actuators and microsystems TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003. 1:328-331 vol.1 2003
Conference
Laviron, C.; Semeria, M.N.; Zahorski, D.; Stehle, M.; Hernandez, M.; Boulmer, J.; Debarre, D.; Kerrien, G.
Extended Abstracts of the Second International Workshop on Junction Technology. IWJT. (IEEE Cat.No.01EX541C) Junction technology Junction Technology, 2001. IWJT. Extended Abstracts of the Second International Workshop on. :91-94 2001
Conference
2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference Advanced Semiconductor Manufacturing Conference, 2009. ASMC '09. IEEE/SEMI. :5-13 May, 2009
Conference
Kerrien, G.; Kakushima, K.; Sarnet, T.; Boulmer, J.; Debarre, D.; Bouchier, D.; Bosseboeuf, A.; Bourouina, T.
IEEE/LEOS International Conference on Optical MEMs Optical MEMS Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on. :129-130 2002
Conference
9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 Advanced thermal processing of semiconductors Advanced Thermal Processing of Semiconductors 9th Internationa Conference on RTP 2001. :146-147 2001
Academic Journal
Borjon, A.; Belledent, J.; Couderc, C.; Rody, Y.; Cam, L.L.; Trouiller, Y.; Gardin, C.; Yesilada, E.; Montgomery, P.; Willkinson, B.; Saied, M.; Sundermann, F.; Urbani, J.-C.; Foussadier, F.; Planchot, J.; Martinelli, C.; Kerrien, G.; Vautrin, F.; Robert, F.; Schiavone, P.
In: Microelectronic Engineering , Proceedings of the 32nd International Conference on Micro- and Nano-Engineering. (Microelectronic Engineering, May 2007, 84(5-8):741-745)
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제한된 항목
[AR] Kerrien, G.
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