e-Journal
Journal of Vacuum Science and Technology B: Nanotechnology & Microelectronics
Document Type
Journal
Publisher
AVS: Science & Technology of Materials, Interfaces, and Processing
Subject
Technology -- Mechanical engineering and machinery -- Vacuum technology; Engineering and Technology -- Engineering -- Mechanical Engineering and Machinery; Vacuum Technology;
Language
ISSN
2166-2746
Online Access
AIP (American Institute of Physics) Plus
1983-01-01 ~ present