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e-Article

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'e-Article' searched 505results | List 20~30
Academic Journal
Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 25(2):356-361 Apr, 2016
Academic Journal
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films. (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 December 2021, 39(6))
Conference
18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. Micro electro mechanical systems Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on. :179-182 2005
Conference
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Solid-State Sensors, Actuators and Microsystems Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on. 1:851-854 Vol. 1 2005
Conference
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Solid-State Sensors, Actuators and Microsystems Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on. 2:1836-1839 Vol. 2 2005
Conference
2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535) Microwave symposium digest Microwave Symposium Digest, 2004 IEEE MTT-S International. 3:1923-1926 Vol.3 2004
Conference
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest Micro electro mechanical systems Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS). :77-80 2004
Conference
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest Micro electro mechanical systems Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS). :426-429 2004
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[AR] Bright, V.M.
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