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Application of Neon Ion Beam for Processing III-V Semiconductors and Atom Probe Sample Preparation of Ga Sensitive Materials
Document Type
Journal Article
Source
JSAP Annual Meetings Extended Abstracts. 2020, :134
Subject
10p-Z15-5
Atom Probe Tomography
III-V Semiconductor
Neon Ion Beam
シンポジウム
先端イオン源顕微鏡技術:ナノ材料・デバイス、生命科学への展開
Language
Japanese
ISSN
2436-7613