KOR

e-Article

Robust Packaging of Vertically Aligned Graphite Substrate by Copper Micro-Rib Structuring.
Document Type
Article
Source
C; Dec2022, Vol. 8 Issue 4, p70, 13p
Subject
GRAPHITE
PLASMA etching
COPPER
PACKAGING
HEAT capacity
PACKAGING materials
OXYGEN plasmas
Language
ISSN
23115629
Abstract
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