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Conference
Finders, J.; Vaenkatesan, V.; Van Kessel, L.; Maas, R.; Van Rhee, T.; Kakkar, V.; Gustas, D.; Van Setten, E.; Van Lare, C.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12953)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12494)
Academic Journal
Maas, D.J.; Herfst, R.; Van Veldhoven, E.; Sadeghian, H.; Fliervoet, T.; Meessen, J.; Vaenkatesan, V.
In: Review of Scientific Instruments . (Review of Scientific Instruments, 1 October 2015, 86(10))
Conference
Lyons, A.; Wallow, T.; Spence, C.; Fu, J.; Hennerkes, C.; Tabery, C.; Long, L.; Kiers, T.; Van Adrichem, P.; Vaenkatesan, V.
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography XII. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11609)
Academic Journal
In: Polymer . (Polymer, 22 November 2006, 47(25):8317-8325)
Periodical
Behringer, Uwe F.W.; Finders, Jo; Davydova, N.; Kottumakulal, R.; Hageman, J.; McNamara, J.; Hoefnagels, R.; Vaenkatesan, V.; van Dijk, A.; Ricken, K.; de Winter, L.; de Kruif, R.; Jonckheere, R.; Hollink, T.; Schiffelers, G.; van Setten, E.; Colsters, P.; Liebregts, W.; Pellens, R.; van Dijk, J.
Proceedings of SPIE; September 2015, Vol. 9661 Issue: 1 p96610B-96610B-14, 9564405p
Conference
Vaenkatesan, V.; Van Adrichem, P.; Kooiman, M.; Kubis, M.; Nam, D.S.; Mulkens, J.; Van Look, L.; Frommhold, A.; Gallagher, E.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology. (Proceedings of SPIE - The International Society for Optical Engineering, 2019, 11178)
Academic Journal
Advanced Functional Materials; Jan2005, Vol. 15 Issue 1, p138-142, 5p
Conference
Vaenkatesan, V.; Finders, J.; Kubis, M.; Mulkens, J.; Tian, Q.; Kuan, C.; Gao, K.; Gallagher, E.; Wiley, J.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2018. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10810)
Periodical
Driessen, Frank A. J. M.; Davydova, Natalia; Jiang, J.; Kang, H.; Vaenkatesan, V.; Oorschot, D.; Kim, I. S.; Kang, S. N.; Lee, Y.; Yeo, J.; Gronlund, K.; Liu, H. Y.; van Ingen-Schenau, K.; Peeters, R.; Wagner, C.; Zimmermann, J.; Schumann, O.
Proceedings of SPIE; October 2011, Vol. 8166 Issue: 1 p81660Z-81660Z-11, 8084352p
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[AR] Vaenkatesan, V.
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