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Academic Journal
Schelcher, G.; De Poortere, E.P.; Kissoon, N.; Paolillo, S.; Silva, M.d.A.C.e.; Zhang, Y.; Tabery, C.; Mulkens, J.; McManus, M.; Leray, P.; Halder, S.
IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 35(3):478-484 Aug, 2022
Academic Journal
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst. Computer-Aided Design of Integrated Circuits and Systems, IEEE Transactions on. 40(7):1464-1475 Jul, 2021
Academic Journal
In: Journal of Micro/Nanopatterning, Materials and Metrology . (Journal of Micro/Nanopatterning, Materials and Metrology, 1 October 2022, 21(4))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12955)
Conference
Chen, J.-M.; Rio, D.; Delorme, M.; Tabery, C.; Hennerkes, C.; Spence, C.; Kam, B.; Brouri, M.; Shamma, N.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical and EUV Nanolithography XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12953)
Periodical
Robinson, John C.; Sendelbach, Matthew J.; Blanco Carballo, V. M.; Canga, E.; Jehoul, C.; Moussa, A.; Tamaddon, A. H.; Tabery, C.; Gunjala, G.; Menchtchikov, B.; Zacca, V. G.; Lalbahadoersing, S.; den Boef, A.; Synowicki, R.
Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124960I-124960I-17, 12371058p
Conference
2006 43rd ACM/IEEE Design Automation Conference Design Automation Conference Design Automation Conference, 2006 43rd ACM/IEEE. :73-76 2006
Conference
Bin Yu; Leland Chang; Ahmed, S.; Haihong Wang; Bell, S.; Chih-Yuh Yang; Tabery, C.; Chau Ho; Qi Xiang; Tsu-Jae King; Bokor, J.; Chenming Hu; Ming-Ren Lin; Kyser, D.
Digest. International Electron Devices Meeting, Electron devices meeting Electron Devices Meeting, 2002. IEDM '02. International. :251-254 2002
Conference
Brunner, T.A.; Tabery, C.; De Poortere, E.; Franke, J.-H.; Truffert, V.; De Bisschop, P.; Hendrickx, E.; Rispens, G.; Duriau, E.; Van De Kerkhof, M.; Van Dijk, A.; Rio, D.
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2023. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12750)
Conference
Carballo, V.M.B.; Canga, E.; Jehoul, C.; Moussa, A.; Tamaddon, A.H.; Tabery, C.; Gunjala, G.; Menchtchikov, B.; Zacca, V.G.; Lalbahadoersing, S.; den Boef, A.; Synowicky, R.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12496)
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[AR] Tabery, C.
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