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1999 International Conference on Simulation of Semiconductor Processes and Devices. SISPAD'99 (IEEE Cat. No.99TH8387) Simulation of semiconductor processes and devices Simulation of Semiconductor Processes and Devices, 1999. SISPAD '99. 1999 International Conference on. :191-194 1999
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Journal of Applied Physics. 7/15/2001, Vol. 90 Issue 2, p587. 12p. 3 Diagrams, 1 Chart, 8 Graphs.
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[AR] Scheubert, P.
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