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e-Article

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In: Journal of Microelectromechanical Systems. (Journal of Microelectromechanical Systems, February 2007, 16(1):163-173)
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In: Progress in Biomedical Optics and Imaging - Proceedings of SPIE, Reliability, Packaging, Testing and Characterization of MEMS/Moems IV. (Progress in Biomedical Optics and Imaging - Proceedings of SPIE, 2005, 5716:158-164)
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[AR] Savkar, A.A.
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