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Hara, Yutaka; Higami, Hiroyuki; Ishikawa, Hiromitsu; Ono, Takeshi; Saito, Shigenori; Ichinari, Kenichiro; Yamamoto, Katsushi
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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) SSolid-State Sensors, Actuators and Microsystems (Transducers), 2021 21st International Conference on. :521-524 Jun, 2021
Conference
2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) Low Temperature Bonding for 3D Integration (LTB-3D), 2021 7th International Workshop on. :35-35 Oct, 2021
Conference
2018 IEEE Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2018 IEEE. :475-478 Jan, 2018
Academic Journal
Nihon Hotetsu Shika Gakkai Zasshi / Journal of the Japan Prosthodontic Society; Feb1999, Vol. 43 Issue 1, p73-79, 7p
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[AR] Saito, Shigenori
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