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Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090) Micro electro mechanical systems Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on. :427-430 2001
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Journal of Applied Physics. 4/15/2006, Vol. 99 Issue 8, p08N711. 3p. 1 Black and White Photograph, 3 Graphs.
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[AR] Pettigrew, K.
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