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Nanoscale Etching of La0.7Sr0.3MnO3 without Etch Lag using Chlorine Based Inductively Coupled Plasma
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Nimphy Sarkar; Jaewoo Han; Daryll Joseph Chavez Dalayoan; Satyabrat Behera; Sang-Hyuk Lee; Cheng Chen; Dai-Sik Kim; Changhee Sohn; 남궁선
Electronic Materials Letters, 19(4), pp.384-390 Jul, 2023
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[AR] Nimphy Sarkar
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