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Robinson, John C.; Sendelbach, Matthew J.; Blanco Carballo, V. M.; Canga, E.; Jehoul, C.; Moussa, A.; Tamaddon, A. H.; Tabery, C.; Gunjala, G.; Menchtchikov, B.; Zacca, V. G.; Lalbahadoersing, S.; den Boef, A.; Synowicki, R.
Proceedings of SPIE; April 2023, Vol. 12496 Issue: 1 p124960I-124960I-17, 12371058p
Conference
Carballo, V.M.B.; Canga, E.; Jehoul, C.; Moussa, A.; Tamaddon, A.H.; Tabery, C.; Gunjala, G.; Menchtchikov, B.; Zacca, V.G.; Lalbahadoersing, S.; den Boef, A.; Synowicky, R.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control XXXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12496)
Conference
Megens, H.; Brinkhof, R.; Kok, H.; Karssemeijer, L.; Haaf, G.T.; Slotboom, D.; De Ruiter, C.; Lyulina, I.; Huisman, S.; Keij, S.; Mos, E.; Tel, W.; Schmitt-Weaver, E.; Bhattacharyya, K.; Kubis, M.; Mulkens, J.; Aarts, I.; Lee, S.; Rijpstra, M.; Socha, R.; Menchtchikov, B.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2019, 10961)
Conference
Menchtchikov, B.; Socha, R.; Zheng, C.; Raghunathan, S.; Aarts, I.; Shome, K.; Lee, J.; De Ruiter, C.; Rijpstra, M.; Megens, H.; Brinkhof, R.; Teeuwisse, F.; Karssemeijer, L.; Lyulina, I.; Li, C.-T.; Hermans, J.; Leray, P.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10587)
Conference
Menchtchikov, B.; Socha, R.; Raghunathan, S.; Lyulina, I.; Schoonewelle, H.; Tinnemans, P.; Tuffy, P.; Leray, P.; Jehoul, C.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXX. (Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10147)
Conference
Leray, P.; Jehoul, C.; Socha, R.; Menchtchikov, B.; Raghunathan, S.; Kent, E.; Schoonewelle, H.; Tinnemans, P.; Tuffy, P.; Belen, J.; Wise, R.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXX. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9778)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8683)
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[AR] Menchtchikov, B.
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