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Hauguth, M.; Volland, B.E.; Ishchuk, V.; Dressler, D.; Danz, T.; Rangelow, I.W.; Kokkoris, G.; Gogolides, E.; Goodyear, A.; Cooke, M.
In Microelectronic Engineering 2009 86(4):976-978
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In Microelectronic Engineering May-June 2008 85(5-6):982-984
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In: Journal of Applied Physics . (Journal of Applied Physics, 15 October 2012, 112(8))
Academic Journal
In: Microelectronic Engineering . (Microelectronic Engineering, October 2012, 98:524-527)
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[AR] Hauguth, M.
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