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Periodical
Guerrero, Douglas; Amblard, Gilles R.; Baek, Seungjoo; Heo, Seonggil; Vandereyken, Jelle; Suh, Hyo Seon; Caron, Elke; Santos, Andreia; Harumoto, Masahiko; Guerrero, Douglas J.
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129572G-129572G-7, 1166156p
Understanding and improving performance of 14-nm HP EUV lithography via rational design of materials
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Li, Si; Sweat, Daniel; Lu, Xinlin; Brakensiek, Kelsey; Lu, Pengtao; Lowes, Joyce; Van Driessche, Veerle; Guerrero, Douglas J.
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p129571T-129571T-8, 1166148p
Periodical
Naulleau, Patrick P.; Gargini, Paolo A.; Itani, Toshiro; Ronse, Kurt G.; Fallica, Roberto; Huang, Weizhong; Suh, Hyo Seon; De Simone, Danilo; Guerrero, Douglas J.; Kato, Kodai
Proceedings of SPIE; November 2023, Vol. 12750 Issue: 1 p127500I-127500I-4, 1147505p
Academic Journal
Lenhart, Joseph L.; Fischer, Daniel; Sambasivan, Sharadha; Lin, Eric K.; Wu, Wen-Li; Guerrero, Douglas J.; Wang, Yubao; Puligadda, Rama
In Applied Surface Science 2007 253(9):4166-4175
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Li, Si; Lowes, Joyce; Zhang, Ruimeng; Luo, Ming; Brakensiek, Kelsey; Driessche, Veerle Van; Guerrero, Douglas J.
Proceedings of SPIE; May 2023, Vol. 12498 Issue: 1 p124980N-124980N-11, 12373032p
Periodical
Sanders, Daniel P.; Guerrero, Douglas; Liang, Yichen; Brakensiek, Kelsey E.; Lowes, Joyce; Chacko, Andrea M.; Zhang, Ruimeng; Van Driessche, Veerle; Lang, Xiaolong; Kasthuri, Jaishankar; Luo, Ming; Guerrero, Douglas J.
Proceedings of SPIE; July 2022, Vol. 12055 Issue: 1 p120550A-120550A-9, 1084960p
Conference
Fallica, Roberto; Huang, Weizhong; Suh, Hyo Seon; De Simone, Danilo; Guerrero, Douglas J.; Kato, Kodai
Proceedings of SPIE; 12/19/2023, Vol. 12750, p127500I-127500I-4, 1p
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Santos, Andreia; Zanders, Wesley; Caron, Elke; Baek, Seungjoo; Heo, Seonggil; Vandereyken, Jelle; Suh, Hyo Seon; Guerrero, Douglas J.; Harumoto, Masahiko; Mitsuashi, Tsuyoshi
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p1295717-1295717-9
Periodical
Guerrero, Douglas; Amblard, Gilles R.; Li, Si; Lu, Xinlin; Grannemann, Stephen; Sweat, Daniel; Brakensiek, Kelsey; Lu, Pengtao; Lowes, Joyce; Krishnamurthy, Vandana; Van Driessche, Veerle; Guerrero, Douglas J.
Proceedings of SPIE; April 2024, Vol. 12957 Issue: 1 p1295715-1295715-13
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[AR] Guerrero, Douglas J.
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