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2006 IEEE International Symposium on Semiconductor Manufacturing Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on. :339-342 Sep, 2006
Conference
Parkinson, Blake; Prager, Dan; Funk, Merritt; Sundararajan, Radha; Yamashita, Asao; Bandy, Kenneth; Meyette, Eric
Proceedings of SPIE; Nov2009 Part 2, Issue 1, p72721J-72721J-11, 11p
Conference
Lee, Hyung; Ranjan, Alok; Prager, Dan; Bandy, Kenneth A.; Meyette, Eric; Sundararajan, Radha; Viswanathan, Anita; Yamashita, Asao; Funk, Merritt
Proceedings of SPIE; Nov2008 Part 2, Issue 1, p69220T-69220T-13, 13p
Conference
Proceedings of SPIE; Nov2006 Part 2, Issue 1, p61520F-61520F-17, 17p
Academic Journal
Parkinson, Blake R.; Lee, Hyung; Funk, Merritt; Prager, Daniel; Yamashita, Asao; Sundararajan, Radha; Edgar, Thomas F.
IEEE Transactions on Semiconductor Manufacturing. May, 2010, Vol. 23 Issue 2, p185, 9 p.
Conference
Sendelbach, Matthew; Natzle, Wesley; Archie, Charles N.; Banke, Bill; Prager, Dan; Engelhard, Dan; Ferns, Jason; Yamashita, Asao; Funk, Merritt; Higuchi, Fumihiko; Tomoyasu, Masayuki
Proceedings of SPIE; Nov2004, Issue 1, p686-702, 17p
Conference
Proceedings of SPIE; Nov2002, Issue 1, p155-161, 7p
Academic Journal
Academic Journal
Chen, Zhiying; Donnelly, Vincent M.; Economou, Demetre J.; Chen, Lee; Funk, Merritt; Sundararajan, Radha
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Sep2009, Vol. 27 Issue 5, p1159-1165, 7p, 1 Diagram, 1 Chart, 11 Graphs
Academic Journal
Xu, Lin; Chen, Lee; Funk, Merritt; Ranjan, Alok; Hummel, Mike; Bravenec, Ron; Sundararajan, Radha; Economou, Demetre J.; Donnelly, Vincent M.
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[AR] Funk, Merritt
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