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Conference
Jing Guo; Janes, Dustin W.; Mignot, Yann; Johnson, Richard C.; Cheng Chi; Chi-Chun Liu; Meli, Luciana; Kuroda, Takuya; DiPaola, Domenico A.; Yuji Tanaka; Masahiko, Harumoto; Felix, Nelson M.; Corliss, Daniel A.
Proceedings of SPIE; 1/21/2019, Vol. 10958, p1-11, 11p
Conference
Proceedings of SPIE; 1/20/2019, Vol. 10957, p109570F-1-109570F-11, 11p
Periodical
Felix, Nelson M.; Lio, Anna; Bekaert, Joost; Gallagher, Emily; Jonckheere, Rik; Van Look, Lieve; Aubert, Remko; Nair, Vineet V.; Timmermans, Marina Y.; Pollentier, Ivan; Hendrickx, Eric; Klein, Alexander; Yeğen, Gokay; Broman, Pär
Proceedings of SPIE; February 2021, Vol. 11609 Issue: 1 p116090Z-116090Z-9, 1044820p
Alternative developer solution/process for EUV lithography: ethyltrimethylammonium hydroxide (ETMAH)
Periodical
Felix, Nelson M.; Lio, Anna; Santillan, Julius Joseph; Harumoto, Masahiko; Motono, Tomohiro; Figueiredo dos Santos, Andreia; Mori, Chisayo; Tanaka, Yuji; Stokes, Harold; Asai, Masaya; Itani, Toshiro
Proceedings of SPIE; February 2021, Vol. 11609 Issue: 1 p116090W-116090W-6, 1044817p
Periodical
Felix, Nelson M.; Lio, Anna; Sherwin, Stuart; Miyakawa, Ryan; Benk, Markus; Waller, Laura; Neureuther, Andrew; Naulleau, Patrick
Proceedings of SPIE; February 2021, Vol. 11609 Issue: 1 p116090B-116090B-14, 11492925p
Periodical
Felix, Nelson M.; Lio, Anna; Mochi, Iacopo; Kim, Hyun-Su; Dejkameh, Atoosa; Nebling, Ricarda; Kazazis, Dimitrios; Locans, Uldis; Shen, Tao; Ekinci, Yasin
Proceedings of SPIE; February 2021, Vol. 11609 Issue: 1 p116090M-116090M-6, 1044817p
Periodical
Felix, Nelson M.; Lio, Anna; Shefer, Dmitry; Nikipelov, Andrey; van de Kerkhof, Mark; Banine, Vadim; Beckers, Job
Proceedings of SPIE; February 2021, Vol. 11609 Issue: 1 p116091F-116091F-8, 1044828p
Periodical
Felix, Nelson M.; Lio, Anna; van de Kerkhof, Mark; Waiblinger, Markus; Weber, Julia; Baur, Christof; Nikipelov, Andrey; Cloin, Christian
Proceedings of SPIE; February 2021, Vol. 11609 Issue: 1 p116090N-116090N-11, 11492922p
Periodical
Felix, Nelson M.; Lio, Anna; Aqad, Emad; Lee, ChoongBong; Coley, Suzanne M.; Yang, Ke; Cui, Li; Goswami, Manibarsha; Popere, Bhooshan C.; Marangoni, Tomas; Cameron, James F.; Thackeray, James
Proceedings of SPIE; February 2021, Vol. 11609 Issue: 1 p116090I-116090I-10, 11492921p
Periodical
Felix, Nelson M.; Lio, Anna; Hosoda, Hirokazu; Nagai, Shinji; Yanagida, Tatsuya; Shiraishi, Yutaka; Ueno, Yoshifumi; Miyao, Kenichi; Hayashi, Hideyuki; Watanabe, Yukio; Abe, Tamotsu; Nakarai, Hiroaki; Mizoguchi, Hakaru
Proceedings of SPIE; February 2021, Vol. 11609 Issue: 1 p116091G-116091G-15, 11493025p
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[AR] Felix, Nelson M.
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