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Conference
Dinh, C.Q.; Cho, K.; Tomori, H.; Kuwahara, Y.; Onitsuka, T.; Okada, S.; Kawakami, S.; Hara, A.; Fujimoto, S.; Muramatsu, M.; Nagahara, S.; Tsuzuki, R.; Liu, X.; Thiam, A.; Feurprier, Y.; Nafus, K.; Carcasi, M.; Huli, L.; Kato, K.; Krawicz, A.; Kocsis, M.; De Schepper, P.; McQuade, L.; Kasahara, K.; Garcia Santaclara, J.; Hoefnagels, R.; La Fontaine, B.; Miyakawa, R.; Anderson, C.; Naulleau, P.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XLI. (Proceedings of SPIE - The International Society for Optical Engineering, 2024, 12957)
Conference
Nishimura, E.; Kushibiki, M.; Kawasaki, T.; Shimura, S.; Iwao, F.; Carcasi, M.; Scheer, S.; Yaegashi, H.
2007 Digest of papers Microprocesses and Nanotechnology Microprocesses and Nanotechnology, 2007 Digest of papers. :396-397 Nov, 2007
Conference
Dinh, C.Q.; Kuwahara, Y.; Dauendorffer, A.; Okada, S.; Fujimoto, S.; Kawakami, S.; Shimura, S.; Muramatsu, M.; Cho, K.; Nagahara, S.; Liu, X.; Nafus, K.; Carcasi, M.; Agarwal, A.; Somervell, M.; Huli, L.; Kato, K.; Kocsis, M.; De Schepper, P.; Meyers, S.; McQuade, L.; Kasahara, K.; Garcia Santaclara, J.; Hoefnagels, R.; Anderson, C.; Naulleau, P.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XL. (Proceedings of SPIE - The International Society for Optical Engineering, 2023, 12498)
Academic Journal
In: Journal of Micro/Nanolithography, MEMS, and MOEMS . (Journal of Micro/Nanolithography, MEMS, and MOEMS, January 2014, 13(1))
Conference
Burns, R.; Berglund, S.; Carcasi, M.; Huli, L.; Bates, C.M.; Somervell, M.; Makoto, M.; Zhang, Y.; Segalman, R.A.; D'ambra, C.; Hawker, C.J.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XXXVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11612)
Conference
Dinh, C.Q.; Shiraishi, G.; Minekawa, Y.; Ide, H.; Kondo, Y.; Yoshida, Y.; Yoshihara, K.; Shimada, R.; Tomono, M.; Moriya, T.; Takeshita, K.; Nagahara, S.; Kamei, Y.; Carcasi, M.; Nafus, K.; Biesemans, S.; Petersen, J.S.; De Simone, D.; Foubert, P.; De Bisschop, P.; Vandenberghe, G.; Stock, H.-J.; Meliorisz, B.
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography X. (Proceedings of SPIE - The International Society for Optical Engineering, 2019, 10957)
Conference
Nagahara, S.; Nakashima, H.; Dinh, C.Q.; Shiraishi, G.; Kondo, Y.; Minekawa, Y.; Ide, H.; Yoshida, Y.; Yoshihara, K.; Shimada, R.; Tomono, M.; Takeshita, K.; Kamei, Y.; Nafus, K.; Carcasi, M.; Biesemans, S.; De Simone, D.; Petersen, J.S.; Foubert, P.; De Bisschop, P.; Vandenberghe, G.; Stock, H.-J.; Meliorisz, B.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XXXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2019, 10960)
Conference
Carcasi, M.; Nagahara, S.; Nakashima, H.; Shiraishi, G.; Minekawa, Y.; Ide, H.; Kondo, Y.; Yoshihara, K.; Tomono, M.; Shimada, R.; Takeshita, K.; Moriya, T.; Kamei, Y.; Nafus, K.; Biesemans, S.; Hori, M.; Maruyama, K.; Nakagawa, H.; Nagai, T.; Shima, M.; Dei, S.; Miyake, M.; Naruoka, T.; Vandenberghe, G.; De Simone, D.; Foubert, P.; Petersen, J.S.; Oshima, A.; Tagawa, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography IX. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10583)
Conference
Nagahara, S.; Nakashima, H.; Carcasi, M.; Nafus, K.; Shiraishi, G.; Minekawa, Y.; Ide, H.; Kondo, Y.; Enomoto, M.; Yoshihara, K.; Shimada, R.; Tomono, M.; Takeshita, K.; Moriya, T.; Makoto, H.; Aizawa, R.; Konishi, Y.; Kamei, Y.; Shiozawa, T.; Yoshida, K.; Biesemans, S.; Hori, M.; Maruyama, K.; Nakagawa, H.; Nagai, T.; Shima, M.; Kimura, T.; Miyake, M.; Dei, S.; Naruoka, T.; Vandenberghe, G.; Petersen, J.S.; De Simone, D.; Philippe, F.; Stock, H.-J.; Meliorisz, B.; Oshima, A.; Tagawa, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XXXV. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10586)
Conference
Nagahara, S.; Nakashima, H.; Carcasi, M.; Shiraishi, G.; Minekawa, Y.; Iseki, T.; Kondo, Y.; Yoshihara, K.; Tomono, M.; Shimada, R.; Nakagawa, H.; Naruoka, T.; Nagai, T.; Dei, S.; Hori, M.; Shiozawa, T.; Kamei, Y.; Nafus, K.; De Simone, D.; Vandenberghe, G.; Foubert, P.; Stock, H.-J.; Küchler, B.; Biesemans, S.; Buitrago, E.; Vockenhuber, M.; Ekinci, Y.; Oshima, A.; Tagawa, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XXXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10146)
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[AR] Carcasi, M.
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