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EFFECT OF CHEMICAL-REACTION STOICHIOMETRY ON THE PRESSURE VARIATIONS IN THE ETCHING CHAMBER DURING ETCHING OF ALUMINUM

Document Type

Journal

Author

MARTISOVITS, V; ZAHORAN, M; KOSINAR, I; TRNOVEC, J

Source

PHYSICS LETTERS A; FEB 22 1993, 173 6, p462-p464, 3p.

Subject

Language

English

ISSN

03759601

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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