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Friction and fracture properties of polysilicon coated with self-assembled monolayers
Document Type
Journal
Author
Ding, JN
;
Wong, PL
;
Yang, JC
Source
WEAR
; JAN 2006, 260 1-2, p209-p214, 6p.
Subject
Language
English
ISSN
00431648
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Full Text (ScienceDirect)
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