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Determination of stress profile and optimization of stress gradient in PECVD poly-SiGe films

Document Type

Journal

Author

Molfese, A; Mehta, A; Witvrouw, A

Source

SENSORS AND ACTUATORS A-PHYSICAL; FEB 28 2005, 118 2, p313-p321, 9p.

Subject

Language

English

ISSN

09244247

Online Access

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