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水素のみを用いた銅のプラズマエッチング技術の開発

Document Type

Journal Article

Author

Hiroaki Kakiuchi; Hiromasa Ohmi; Jumpei Sato; Kiyoshi Yasutake; Tatsuya Hirano; Yusuke Kubota; 久保田雄介; 佐藤純平; 垣内弘章; 大参宏昌; 安武潔; 平野達也

Source

Proceedings of JSPE Semestrial Meeting. 2016, :163

Subject

copper
plasma etching
プラズマエッチング
銅

Language

Japanese

Online Access

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