e-Article
Sticking Prevention of Resonant Strain Sensors
Document Type
Journal Article
Author
Source
IEEJ Transactions on Sensors and Micromachines. 2000, 120(5):245
Subject
Language
English
ISSN
1341-8939
1347-5525
1347-5525
Abstract
Sticking is a fundamental phenomenon on micromachined devices or tructures. This paper describes about a practical and successful method of prevention for micromachined resonators from sticking and estimation of its sticking resistance based on experimental data.