e-Article
Observation of (Hf,Zr)O2 thin films by scanning nonlinear dielectric microscopy / 走査型非線形誘電率顕微鏡による(Hf,Zr)O2薄膜の観察
Document Type
Journal Article
Author
Source
JSAP Annual Meetings Extended Abstracts. 2020, :1241
Subject
Language
Japanese
ISSN
2436-7613