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Composition, chemical structure, and electronic band structure of rare earth oxide/Si(1 0 0) interfacial transition layer

Document Type

Article

Author

Hattori, T; Yoshida, T; Shiraishi, T; Takahashi, K; Nohira, H; Joumori, S; Nakajima, K; Suzuki, M; Kimura, K; Kashiwagi, I; Ohshima, C; Ohmi, S; Iwai, H

Source

In Microelectronic Engineering 2004 72(1):283-287

Subject

Language

ISSN

0167-9317

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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