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Morphological and electrical comparison of Ti and Ta based ohmic contacts for AlGaN/GaN-on-SiC HFETs

Document Type

Article

Author

Pooth, A.; Bergsten, J.; Rorsman, N.; Hirshy, H.; Perks, R.; Tasker, P.; Martin, T.; Webster, R.F.; Cherns, D.; Uren, M.J.; Kuball, M.

Source

In Microelectronics Reliability January 2017 68:2-4

Subject

Language

ISSN

0026-2714

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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