e-Article
Real Time Measurement of Exact Size and Refractive Index of Particles in Liquid by Flow Particle Tracking Method
Document Type
Conference
Author
Source
2018 International Symposium on Semiconductor Manufacturing (ISSM) Semiconductor Manufacturing (ISSM), 2018 International Symposium on. :1-4 Dec, 2018
Subject
Language
Abstract
It is known that particle size obtained from the Brownian motion of a particle is called the diffusion coefficient equivalent size (DCES) and is close to the geometric size independent of the physical properties of particle. This paper describes that we succeeded in measurement of particle size and the number concentration of particles by a new instrument that measures the displacement of particles by Brownian motion except the influence of flow field in real time using the flow particle tracking (FPT) method. Furthermore, we succeeded in evaluation of refractive index of particles by simultaneous measurement of DCES and light scattering intensity of particles.