e-Article
FEM modeling SAW humidity sensor based on ZnO/IDTs/AlN/Si structures
Document Type
Conference
Author
Source
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International. :1160-1163 Jun, 2011
Subject
Language
ISSN
2159-547X
2164-1641
2164-1641
Abstract
In this study, we demonstrate a finite element method (FEM) simulation approach of surface acoustic wave (SAW) humidity sensors. The polycrystalline Zinc oxide (ZnO)/ Aluminum nitride (AlN)/Si-layered structure was simulated for SAW resonators and compared with experiment results. The humidity absorption behaviors of ZnO films coating on the propagation characteristics of the SAW were investigated by FEM modeling in the absence and presence of water vapor. The simulation frequency shift in different relative humidity (RH%) agreed with experiments values and gave a new approach to SAW sensor designing based on piezoelectric thin films.