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e-Article

Efficient Fabrication Process of Ordered Metal Nanodot Arrays for Infrared Plasmonic Sensor
Document Type
article
Source
Micromachines, Vol 10, Iss 6, p 385 (2019)
Subject
nanomaterials
plasmonics
nanodot array
thermal dewetting
absorbance spectrum
infrared plasmonic sensor
Mechanical engineering and machinery
TJ1-1570
Language
English
ISSN
2072-666X
Abstract
In this paper, a simple process to fabricate ordered Au nanodot arrays up to 520 nm in diameter that respond to infrared light is developed, and the feasibility of its application to infrared plasmonic sensors is shown. The developed process utilizes thermal dewetting to agglomerate a coated gold film into nanodots. It was difficult to produce large nanodots that responded to infrared light owing to dot separation. In this paper, therefore, the mechanism of dot agglomeration by thermal dewetting is studied via an experiment and theoretical model, and conditions to form single nanodots are clarified. Furthermore, Au nanodot arrays of 100 nm to 520 nm in diameter were fabricated by this process, and their absorption spectra were analyzed. In addition, an analysis of the change in the peak wavelength against the refractive index indicates the possibility of further improvement of the sensitivity of the infrared plasmon sensors.