e-Article – 부산대학교 도서관

e-Article

replayBack to search results

searchSearch screen

Impact of sub-melt laser annealing on Si1-xGex source /drain defectivity.

Document Type

Article

Author

Rosseel, E.; Lu, J.P.; Hikavyy, A.; Verheyen, P.; Hoffmann, T.; Richard, O.; Geypen, J.; Bender, H.; Loo, R.; Absil, P.; McIntosh, R.; Felch, S.B.; Schreutelkamp, R.

Source

2007 15th International Conference on Advanced Thermal Processing of Semiconductors; 2007, p307-315, 9p

Subject

Language

Online Access

Full Text (IEEE) Find it@PNU

이메일