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'Catalog' Results sorted by 21Number
Foreign Book
Microlithography : science and technology
Suzuki, Kazuaki
Boca Raton: CRC Press, c2007.
Nano-Life Science Library
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Foreign Book
Polymers in microlithography : materials and processes
Reichmanis, Elsa
Washington, DC : American Chemical Society , 1989.
Central Library
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Domestic Book
Handbook of VLSI Microlithography
Glenadinning, W.B
New Jersey: Noyes, 1991
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Foreign Book
Materials and processes for next generation lithography
Robinson, Alex
Amsterdam : Elsevier, 2016.
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Foreign Book
Fundamental principles of optical lithography :the science of microfabrication
Mack, Chris A
Chichester, West Sussex, England
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Foreign Book
Nanoimprint lithography :an enabling process for nanofabrication
Zhou, Weimin
Heidelberg
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Foreign Book
Nanolithography and patterning techniques in microelectronics
Bucknall, David G
Cambridge : Woodhead Publishing
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Foreign Book
Nanoimprint lithography :principles, processes and materials
Lan, Hongbo
New York : Nova Science Publishers, Inc., c2011.
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Foreign Book
Lithography process control
Levinson, Harry J
Bellingham, Wash.: SPIE Optical Engineering Press, c1999.
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Foreign Book
Principles of lithography
Levinson, Harry J
Bellingham, WA: SPIE Press, c2004.
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Restricted item(1)
All : Microlithography
Publication Years(16)
Branches(3)
Material Types(2)
Authors(20)
Languages(2)
Publishers(16)
Subjects(20)

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