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Foreign Book
MEMS :fundamental technology and applications
Choudhary, Vikas
Boca Raton : CRC Press, 2017.
Central Library
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Foreign Book
MEMS : a practical guide to design, analysis, and applications
Korvink, J. G
Norwich, NY: W. Andrew Pub., c2006.
Nano-Life Science Library
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MEMS= Micro Electro Mechanical System
구영덕
서울 : 한국과학기술정보연구원, 2002.
Saebyeokbeol Library
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MEMS의 기초
Liu, Chang
서울 : 한티미디어, 2009
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MEMS 기술을 이용한 디지털 마이크로미러 디스플레이 소자 및 시스템 개발=Development of digital micromirror device and system using MEMS technology for next generation display
한국
[과천]: 지식경제부, 2008.
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MEMS 엑츄에이터 신뢰성 설계기술=Reliable design of MEMS Actuators
한국
[과천]: 과학기술부, 2007.
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첨단과학기술(NT,MEMS,BT)전시주제 및 전시기법 개발=(The)Development of the exhibition themes and the display technique about the cutting edge science and technology, "NT, MEMS and BT"
한국
과천: 과학기술부, 2006.
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Thesis
Highly Sensitive MEMS Biosensors for the Detection of Human Papilloma Virus by Using Magnetic Force =자기력 미세조정 방식 인유두종 바이러스 진단용 고감도 MEMS 바이오센서
김형훈
부산 : 부산대학교, 2013
Nano-Life Science Library
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Thesis
Dishing reduction on polysilicon CMP for MEMS application= MEMS 적용을 위한 폴리실리콘 CMP에서 디싱 감소에 관한 연구
박성민
부산: 부산대학교, 2007.
Nano-Life Science Library
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Thesis
폴리실리콘 MEMS 구조물의 평탄화에 관한 연구= Research for planarization of polisilicon MEMS structures
정문기
부산: 부산대학교, 2005.
Nano-Life Science Library
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All : MEMS
Publication Years(49)
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Authors(19)
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