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전자부품 배선 박막의 이해와 응용
King-ning tu
서울 : 한티미디어, 2016
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박막과 스퍼터링이야기 =Thin film and sputtering
최용락
서울 : 지식과감성#, 2013
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초고집적 소자의 적용 Nano-pore 구조를 갖는 저유전 박막 형성과 공정기술 개발연구=Study on development and processing technology for the formation of the low dielectric thin films with nano-pore structure in ULSI devices
한국
과천: 과학기술부, 2006.
Saebyeokbeol Library
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직접패턴형 강유전박막 형성을 위한 e-beam 리소그래피용 전구체 개발= Development of e-beam lithographic precursors for direct-patternable ferroelectric thin films
한국
[과천] : 과학기술부, 2005.
Saebyeokbeol Library
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유기 디스플레이용 기판 및 passivation 기술 개발= Development of organic display substrate and passivation technology
한국
[과천] : 산업자원부, 2005.
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초고집적 소자의 적용 nano-pore 구조를 갖는 저유전 박막 형성과 공정기술 개발연구=Study on development and processing technology for the formation of the low dielectric thin film with nano-pore structure
한국
경기도: 과학기술부, 2003.
Saebyeokbeol Library
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Thesis
Growth Mechanism of Epitaxial Cu Thin Films Grown by RF-sputtering =RF-sputtering 법으로 Epitaxy 성장된 구리 단결정 박막의 결정 성장 매커니즘 분석 및 nano scale에서의 결정성 분석 연구
박호열
부산 : 부산대학교 대학원, 2016
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Thesis
O₂/FTES-Helicon plasma CVD 방법에 의한 Fluorocarbonated-SiOF 박막형성과 그 특성/= Formation and characteristics of the fluorocarbonated SiOF film by O₂/FTES-Helicon plasma CVD Method
오경숙
제주: 濟州大學校, 1997.
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금속 표면에서 제올라이트 박막 형성에 대한 연구
최용석
광주: 全南大學校, 1999.
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헬리콘 플라즈마 CVD 방법에 의한 저유전율 SiOF 박막 형성과 그 특성
오윤정
제주 : 濟州大學校, 1996.
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All : 박막 형성[薄膜形成]
Publication Years(16)
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Authors(20)
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