Catalog
| LDR | 01148nas a2200325 a 4500 | ||
| 001 | 0091847832▲ | ||
| 003 | Uk▲ | ||
| 005 | 20180519192927▲ | ||
| 007 | ta|||▲ | ||
| 008 | 070509c20079999wauqr p 0 a0eng ▲ | ||
| 022 | 0 | ▼a1932-5150▼y1537-1646▲ | |
| 040 | ▼aUk▼beng▼cUk▲ | ||
| 042 | ▼aukblsr▲ | ||
| 082 | 0 | 4 | ▼a621.3815▼221▲ |
| 090 | ▼a621.3815▼bJ86s▲ | ||
| 245 | 0 | 0 | ▼aJournal of micro/nanolithography, MEMS, and MOEMS :▼bJM3.▲ |
| 246 | 3 | ▼aJournal of micro/nanolithography, microelectromechanical systems and micro-opto-electro-mechanical systems▲ | |
| 246 | 3 | 0 | ▼aJM3▲ |
| 260 | ▼aBellingham, Wash. :▼bSPIE,▼c2007-▲ | ||
| 300 | ▼av. :▼bill. (some col.), ports. ;▼c28 cm.▲ | ||
| 310 | ▼aQuarterly▲ | ||
| 362 | 0 | ▼aVol. 6, no. 1 (Jan./Mar. 2007)-▲ | |
| 540 | ▼aCurrent Copyright Fee: GBP15.00▼c0▼5Uk▲ | ||
| 650 | 0 | ▼aMicrolithography▼vPeriodicals.▲ | |
| 650 | 0 | ▼aNanotechnology▼vPeriodicals.▲ | |
| 650 | 0 | ▼aMicroelectromechanical systems▼vPeriodicals.▲ | |
| 710 | 2 | ▼aSociety of Photo-optical Instrumentation Engineers.▲ | |
| 780 | 0 | 0 | ▼tJournal of microlithography, microfabrication and microsystems,▼x1537-1646▲ |
| 856 | 4 | ▼uhttp://www.riss.kr/link?id=O44861746▲ | |
| 999 | ▼c박미소▲ |
Journal of micro/nanolithography, MEMS, and MOEMS :JM3
Document Type
외국학술지지원센터자료(FRIC)
Title
Journal of micro/nanolithography, MEMS, and MOEMS : JM3.
Various title
Journal of micro/nanolithography, microelectromechanical systems and micro-opto-electro-mechanical systems
JM3
JM3
Corporate Name
Publication
Bellingham, Wash. : SPIE , 2007-
Physical Description
v. : ill. (some col.), ports. ; 28 cm.
Publication Frequency
Quarterly
Volume
Vol. 6, no. 1 (Jan./Mar. 2007)-
Subject
Call Number
621.3815 J86s
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