Catalog
| LDR | 00568camua2200205 4500 | ||
| 001 | 0000084573▲ | ||
| 005 | 20180519111829▲ | ||
| 008 | 950207s1984 ja a 001 jpnhd▲ | ||
| 056 | ▼a 569▲ | ||
| 090 | ▼a 569 ▼b 호67ㅎ▲ | ||
| 100 | 1 | ▼a 호우, 코우이치로우, ▼e 편.▲ | |
| 245 | 0 | 0 | ▼a 半導體リソグラフィ技術 / ▼c 鳳 紘一郞 編著.▲ |
| 260 | ▼a 東京 : ▼b 産業圖書 , ▼c 昭和59(1984).▲ | ||
| 300 | ▼a 221 p. : ▼b ill. ; ▼c 22 cm.▲ | ||
| 490 | 1 | 0 | ▼a 集積回路プロセス技術シリズ▲ |
| 504 | ▼a Includes bibliographical references and index.▲ | ||
| 740 | 1 | ▼a 한도우타이 리소그러피 기쥬쓰▲ | |
| 830 | 0 | ▼a 슈우세키 카이로 프로우세스 기쥬쓰 시리즈▲ | |
| 890 | ▼h 245체, 260도▲ | ||
| 950 | ▼a phk▲ |
半導體リソグラフィ技術
Document Type
Foreign Book
Title
半導體リソグラフィ技術 / 鳳 紘一郞 編著.
부출서명
한도우타이 리소그러피 기쥬쓰
Author
Publication
東京 : 産業圖書 , 昭和59(1984).
Physical Description
221 p. : ill. ; 22 cm.
Series Title
Bibliography Note
Includes bibliographical references and index.
Call Number
569 호67ㅎ
Items
RReservation
AAbsent
VPreservation
CLoan Campus
QRush Cataloging
DDelivery Service
SSMS
PPrint
HHolding Journal DDS
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