학술논문
'학술논문'
에서 검색결과 55건 | 목록
10~20
Conference
Soltani, E.; Le-Gratiet, B.; Desmoulins, S.; Bérard-Bergery, S.; Pradelles, J.; Sicurani, E.; Tiron, R.
In: Proceedings of SPIE - The International Society for Optical Engineering , 37th European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12472)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Patterning Materials and Processes XXXIX. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12055)
Conference
Van Dijk, L.; Adal, K.M.; Golmakaniyoon, S.; Haque, N.; Sahraeian, R.; Van Haren, R.; Le-Gratiet, B.; Lam, A.
In: ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings , 2022 33rd Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2022. (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, 2022, 2022-May)
Conference
Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-8, 8p
Conference
Le-Gratiet, B.; Mermet, O.; Gardin, C.; Desmoulins, S.; Kiers, T.; Wang, Y.; Tang, P.; Tien, D.; Wang, F.; Prentice, C.; Tel, W.; Hunsche, S.
Proceedings of SPIE; 1/22/2019, Vol. 10959, p1-11, 11p
Academic Journal
Le-Gratiet, B.; De-Caunes, J.; Gatefait, M.; Lam, A.; Ostrovsky, A.; Planchot, J.; Farys, V.; Ducoté, J.; Mikolajczak, M.; Morin, V.; Chojnowski, N.; Sundermann, F.; Pelletier, A.; Bouyssou, R.; Monget, C.; Chapon, J.D.; Orlando, B.; Babaud, L.; Yesilada, E.; Szucs, A.; Michel, J.-C.; Bengoechea, O.R.; Gouraud, P.; Lapeyre, C.; Desvoivres, L.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 April 2015, 14(2))
Conference
Le-Gratiet, B.; Bouyssou, R.; Ducoté, J.; Ostrovsky, A.; Beylier, C.; Gardin, C.; Schuch, N.; Annezo, V.; Schneider, L.; Millequant, M.; Petroni, P.; Figueiro, T.; Schiavone, P.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2020, 11325)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2020, 11325)
Periodical
Ukraintsev, Vladimir A.; Adan, Ofer; Kessar, M.; Le-Gratiet, B.; Lemaire, P.; Brouzet, V.; Le Cunff, D.; Gredy, V.
Proceedings of SPIE; May 2019, Vol. 10959 Issue: 1 p109592Q-109592Q-8, 986337p
Periodical
Ukraintsev, Vladimir A.; Adan, Ofer; Le-Gratiet, B.; Mermet, O.; Gardin, C.; Desmoulins, S.; Kiers, T.; Wang, Y.; Tang, P.; Tien, D.; Wang, F.; Prentice, C.; Tel, W.; Hunsche, S.
Proceedings of SPIE; May 2019, Vol. 10959 Issue: 1 p109591A-109591A-11, 10849521p
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제한된 항목
[AR] Le-Gratiet, B.
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