학술논문
'학술논문'
에서 검색결과 16건 | 목록
1~10
Conference
Demolliens, O.; Berruyer, P.; Morand, Y.; Tabone, C.; Roman, A.; Cochet, M.; Assous, M.; Feldis, H.; Blanc, R.; Tabouret, E.; Louis, D.; Arvet, C.; Lajoinie, E.; Gobil, Y.; Passemard, G.; Jourdan, F.; Moussavi, M.; Cordeau, M.; Morel, T.; Mourier, T.; Ulmer, L.; Sicurani, E.; Tardif, F.; Beverina, A.; Trouillet, Y.; Renaud, D.
Proceedings of the IEEE 1999 International Interconnect Technology Conference (Cat. No.99EX247) Interconnect technology Interconnect Technology, 1999. IEEE International Conference. :198-199 1999
Conference
European Workshop Materials for Advanced Metallization, Materials for advanced metallization Materials for Advanced Metallization, 1997. MAM '97 Abstracts Booklet., European Workshop. :86-87 1997
Conference
Soltani, E.; Le-Gratiet, B.; Desmoulins, S.; Bérard-Bergery, S.; Pradelles, J.; Sicurani, E.; Tiron, R.
In: Proceedings of SPIE - The International Society for Optical Engineering , 37th European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2022, 12472)
Conference
Bicaïs-Lépinay, N.; André, F.; Brevers, S.; Guyader, P.; Trouiller, C.; Kwakman, L.F.Tz.; Pokrant, S.; Verkleij, D.; Schampers, R.; Ithier, L.; Sicurani, E.; Wyon, C.
Proceedings of SPIE; Nov2006, Issue 1, p615217-615217-10, 10p
Academic Journal
Bonnetier, S.; Anilturk, O.; Barr, A.; Mayet, N.; Imbert, B.; Hopstaken, M.; Barge, D.; Galpin, D.; Zoll, S.; Sicurani, E.; Caillat, C.; Gonella, R.; Espinoux, Y.; Gotti, A.; Basso, M.-T.; Gwoziecki, R.; Mur, P.
In: Microelectronic Engineering . (Microelectronic Engineering, November 2007, 84(11):2528-2532)
Academic Journal
In: Microelectronic Engineering . (Microelectronic Engineering, November 1997, 37-38:347-352)
Periodical
Microelectronic Engineering; 1997, Vol. 37 Issue: 1 p347-352, 6p
Conference
In: 2007 Proceedings - 12th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2007 , 2007 Proceedings - 12th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2007. (2007 Proceedings - 12th International Chemical-Mechanical Planarization for ULSI Multilevel Interconnection Conference, CMP-MIC 2007, 2007, :480-483)
Conference
Warrick, S.; Conley, W.; Barr, A.; Lucas, K.; Cruau, D.; Gomez, J.-M.; Morton, R.; Belledent, J.; Plantier, V.; Gemmink, J.-W.; Mauri, A.; Chapon, J.-D.; Monget, C.; Sicurani, E.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XIX. (Proceedings of SPIE - The International Society for Optical Engineering, 2006, 6154 I)
Conference
Blanc-Coquand, S.; Hinschberger, B.; Rouchouze, E.; Sicurani, E.; Castagna, M.; Weschler, M.; Dworkin, L.; Renard, D.; Panyasak, A.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2004, 5375(PART 2):819-826)
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제한된 항목
[AR] Sicurani, E.
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