학술논문
'학술논문'
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1~10
Academic Journal
Le-Gratiet, B.; De-Caunes, J.; Gatefait, M.; Lam, A.; Ostrovsky, A.; Planchot, J.; Farys, V.; Ducoté, J.; Mikolajczak, M.; Morin, V.; Chojnowski, N.; Sundermann, F.; Pelletier, A.; Bouyssou, R.; Monget, C.; Chapon, J.D.; Orlando, B.; Babaud, L.; Yesilada, E.; Szucs, A.; Michel, J.-C.; Bengoechea, O.R.; Gouraud, P.; Lapeyre, C.; Desvoivres, L.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 April 2015, 14(2))
Periodical
Behringer, Uwe F.W.; Finders, Jo; Gatefait, M.; Lam, A.; Le Gratiet, B.; Mikolajczak, M.; Morin, V.; Chojnowski, N.; Kocsis, Z.; Smith, I.; Decaunes, J.; Ostrovsky, A.; Monget, C.
Proceedings of SPIE; September 2015, Vol. 9661 Issue: 1 p96610P-96610P-7, 869498p
Conference
Gatefait, M.; Lam, A.; Le Gratiet, B.; Mikolajczak, M.; Morin, V.; Chojnowski, N.; Kocsis, Z.; Smith, I.; Decaunes, J.; Ostrovsky, A.; Monget, C.
In: Proceedings of SPIE - The International Society for Optical Engineering , 31st European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9661)
Integration and automation of DoseMapper™ in a logic fab APC system. Application for 45/40/28nm node
Conference
Le-Gratiet, B.; Salagnon, C.; De-Caunes, J.; Mikolajczak, M.; Morin, V.; Chojnowski, N.; Sundermann, F.; Massin, J.; Pelletier, A.; Metz, J.; Bouyssou, R.; Pelissier, A.; Belmont, O.; Strapazzon, A.; Phillips, A.; Devoivre, T.; Bernard, E.; Batail, E.; Thevenon, L.; Bry, B.; Bernard-Granger, F.; Oumina, A.; Baron, M.-P.; Gueze, D.; Blancquaert, Y.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2012, 8324)
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[AR] Chojnowski, N.
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