학술논문
'학술논문'
에서 검색결과 38건 | 목록
10~20
Conference
Meli, L.; Petrillo, K.; De Silva, A.; Arnold, J.; Felix, N.; Robinson, C.; Briggs, B.; Matham, S.; Mignot, Y.; Shearer, J.; Hamieh, B.; Hontake, K.; Huli, L.; Lemley, C.; Hetzer, D.; Liu, E.; Akiteru, K.; Kawakami, S.; Shimoaoki, T.; Hashimoto, Y.; Ichinomiya, H.; Kai, A.; Tanaka, K.; Jain, A.; Choi, H.; Saville, B.; Lenox, C.
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography IX. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10583)
Conference
Montanini, P.; Haran, B.; Hook, T.; Hamieh, B.; Corliss, D.; Wang, J.; Miao, X.; Sporre, J.; Loubet, N.; Sieg, S.; Mochizuki, S.; Seo, S.; Greene, A.; Shearer, J.; Fan, S.; Chao, R.; Arceo, A.; Chung, K.; Adusumilli, P.; Amanapu, H.P.; Bi, Z.; Chen, H.-C.; Conti, R.; Gluschenkov, O.; Lee, C.; Lie, F.; Liu, Z.; Mehta, S.; Miller, E.; Sankarapandian, M.; Southwick, R.; Surisetty, C.; Xu, P.; Xu, Y.; Yeh, C.; Li, J.; Demarest, J.; Arnold, J.; Canaperi, D.; Dunn, D.; Felix, N.; Gupta, D.; Jagannathan, H.; Kanakasabapathy, S.; Oldiges, P.; Skordas, S.; Standaert, T.; Yamashita, T.; Colburn, M.; Na, M.; Paruchuri, V.; Divakaruni, R.; Gow, T.; Bu, H.; Khare, M.; Xie, R.; Akarvardar, K.; Tripathi, N.; Johnson, S.; Fronheiser, J.; Sung, M.; Prindle, C.; Labonte, A.; Liebmann, L.; Galatage, R.; Kamineni, V.; Kim, K.; Niimi, H.; Niu, C.; Park, C.; Raymond, M.; Sahu, B.; Siddiqui, S.; Sun, L.; Tsai, S.; Zeitzoff, P.; Zhang, J.; Kleemeier, W.; Labelle, C.; Mottura, M.; Knorr, A.; Cheon, K.; Cha, J.; Park, D.; Whang, S.; Lian, S.; Lee, S.
In: Technical Digest - International Electron Devices Meeting, IEDM , 2016 IEEE International Electron Devices Meeting, IEDM 2016. (Technical Digest - International Electron Devices Meeting, IEDM, 31 January 2017, :2.7.1-2.7.4)
Conference
De Silva, A.; Petrillo, K.; Meli, L.; Shearer, J.C.; Seshadri, I.; Saulnier, N.; Lee, J.; Arnold, J.C.; Hamieh, B.; Felix, N.M.; Beique, G.; Sun, L.; Oh, T.; Han, S.; Furukawa, T.; Singh, L.; Ayothi, R.
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography VIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10143)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10145)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXX. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9778)
Conference
Felix, N.; Corliss, D.; Petrillo, K.; Saulnier, N.; Xu, Y.; Meli, L.; Tang, H.; De Silva, A.; Hamieh, B.; Burkhardt, M.; Mignot, Y.; Johnson, R.; Robinson, C.; Breton, M.; Seshadri, I.; Dunn, D.; Sieg, S.; Miller, E.; Beique, G.; Labonte, A.; Sun, L.; Han, G.; Verduijn, E.; Han, E.; Kim, B.C.; Kim, J.; Hontake, K.; Huli, L.; Lemley, C.; Hetzer, D.; Kawakami, S.; Matsunaga, K.
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography VII. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9776)
Conference
Lee, C.; Nagabhirava, B.; Goss, M.; Wang, P.; Friddle, P.; Schmitz, S.; Wu, J.; Yang, R.; Mignot, Y.; Rassoul, N.; Hamieh, B.; Beique, G.; Labonte, A.; Labelle, C.; Arnold, J.; Mucci, J.
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9428)
Conference
Saulnier, N.; Xu, Y.; Cheong, L.L.; Arnold, J.C.; Felix, N.; Colburn, M.; Wang, W.; Sun, L.; Beique, G.; Lallement, R.; Hamieh, B.
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9422)
Conference
Feurprier, Y.; Lutker-Lee, K.; Rastogi, V.; Matsumoto, H.; Chiba, Y.; Metz, A.; Kumar, K.; Beique, G.; Labonte, A.; Labelle, C.; Mignot, Y.; Hamieh, B.; Arnold, J.
In: Proceedings of SPIE - The International Society for Optical Engineering . (Proceedings of SPIE - The International Society for Optical Engineering, 2015, 9428)
Conference
Sreenivasa, R.; Haran, B.; Gupta, D.; Guo, D.; Standaert, T.; Shang, H.; Alptekin, E.; Boye, C.; Chao, R.; Cheng, K.; Hook, T.; Jung, R.; Ko, S.-B.; Lie, F.L.; Liu, D.; Mallela, H.; McLellan, E.; Mehta, S.; Nam, J.; Nelson, F.; Ok, I.; Ramachandran, R.; Sankarapandian, M.; Sardesai, V.; Scholze, A.; Seo, S.-C.; Shearer, J.; Southwick, R.; Stieg, S.; Strane, J.; Sun, X.; Surisetty, C.; Tsutsui, G.; Vega, R.; Waskiewicz, C.; Weybright, M.; Yeh, C.-C.; Bu, H.; Burns, S.; Canaperi, D.; Colburn, M.; Jagannathan, H.; Kanakasabaphthy, S.; Liebmann, L.; McHerron, D.; Oldiges, P.; Paruchuri, V.; Spooner, T.; Stathis, J.; Divakaruni, R.; Gow, T.; Khare, M.; Seo, K.-I.; Bae, D.-I.; Bae, G.; Hong, J.G.; Jung, J.; Lee, D.; Kim, B.; Kim, K.; Kim, T.S.; Park, Y.; Chanemougame, D.; Hamieh, B.; Lherron, B.; Montanini, P.; Mottura, M.; Celik, M.; Kleemeier, W.; Sampson, R.; Xie, R.; Cai, H.; Cho, J.; Choi, K.; Jang, L.; Kambhampati, R.; Kim, H.; Nam, S.; Park, C.; Paul, A.; Prindle, C.; Sung, M.G.; Tripathi, N.; Iacoponi, J.; Jenq, J.
In: Digest of Technical Papers - Symposium on VLSI Technology . (Digest of Technical Papers - Symposium on VLSI Technology, 8 September 2014)
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[AR] Hamieh, B.
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