학술논문
'학술논문'
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Academic Journal
Meli, L.; Petrillo, K.; De Silva, A.; Arnold, J.; Felix, N.; Robinson, C.; Briggs, B.; Matham, S.; Mignot, Y.; Shearer, J.; Hamieh, B.; Hontake, K.; Huli, L.; Lemley, C.; Hetzer, D.; Liu, E.; Akiteru, K.; Kawakami, S.; Shimoaoki, T.; Hashimoto, Y.; Ichinomiya, H.; Kai, A.; Tanaka, K.; Jain, A.; Choi, H.; Saville, B.; Lenox, C.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 January 2019, 18(1))
Conference
Shibata, N.; Huli, L.; Lemley, C.; Hetzer, D.; Liu, E.; Akiteru, K.; Kawakami, S.; Petrillo, K.; Meli, L.; Felix, N.; Murray, C.; Hubbard, A.; Johnson, R.
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2018. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10809)
Conference
Meli, L.; Petrillo, K.; De Silva, A.; Arnold, J.; Felix, N.; Robinson, C.; Briggs, B.; Matham, S.; Mignot, Y.; Shearer, J.; Hamieh, B.; Hontake, K.; Huli, L.; Lemley, C.; Hetzer, D.; Liu, E.; Akiteru, K.; Kawakami, S.; Shimoaoki, T.; Hashimoto, Y.; Ichinomiya, H.; Kai, A.; Tanaka, K.; Jain, A.; Choi, H.; Saville, B.; Lenox, C.
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography IX. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10583)
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제한된 항목
[AR] Akiteru, K.
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