학술논문

	o	ㅋ	ㄱ	ㅅ	ㅈ	ㅌ	ㄷ	촉	ㄴ	ㅎ	ㅂ	ㅃ	ㅁ	야	ㄹ	와
ㅏ	あ a	ぁ	か ka	が ga	さ sa	ざ za	た ta	だ da		な na	は ha	ば ba	ぱ pa	ま ma	や ya	ゃ lya	ら ra	わ wa	ゎ lwa	ん n
l	い i	ぃ	き ki	ぎ gi	し si	じ zi	ち ti	ぢ di		に ni	ひ hi	び bi	ぴ pi	み mi			り ri
ㅜ	う u	ぅ	く ku	ぐ gu	す su	ず zu	つ tu	づ du	っ	ぬ nu	ふ hu	ぶ bu	ぷ pu	む mu	ゆ yu	ゅ lyu	る ru
ㅔ	え e	ぇ	け ke	げ ge	せ se	ぜ ze	て te	で de		ね ne	へ he	べ be	ぺ pe	め me			れ re
ㅗ	お o	ぉ	こ ko	ご go	そ so	ぞ zo	と to	ど do		の no	ほ ho	ぼ bo	ぽ po	も mo	よ yo	ょ lyo	ろ ro	を wo

	o	ㅋ	ㄱ	ㅅ	ㅈ	ㅌ	ㄷ	촉	ㄴ	ㅎ	ㅂ	ㅃ	ㅁ	야	ㄹ	와
ㅏ	ア a	ァ	カ ka	ガ ga	サ sa	ザ za	タ ta	ダ da		ナ na	ハ ha	バ ba	パ pa	マ ma	ヤ ya	ャ lya	ラ ra	ワ wa	ヮ lwa		ン n
l	イ i	ィ	キ ki	ギ gi	シ si	ジ zi	チ ti	ヂ di		ニ ni	ヒ hi	ビ bi	ピ pi	ミ mi			リ ri
ㅜ	ウ u	ゥ	ク ku	グ gu	ス su	ズ zu	ツ tu	ヅ du	ッ	ヌ nu	フ hu	ブ bu	プ pu	ム mu	ユ yu	ュ lyu	ル ru			ヴ vu
ㅔ	エ e	ェ	ケ ke	ゲ ge	セ se	ゼ ze	テ te	デ de		ネ ne	ヘ he	ベ be	ぺ pe	メ me			レ re
ㅗ	オ o	ォ	コ ko	ゴ go	ソ so	ゾ zo	ト to	ド do		ノ no	ホ ho	ボ bo	ポ po	モ mo	ヨ yo	ョ lyo	ロ ro	ヲ wo		ーー

독일어
ä	Ä	ö	Ö	ü	Ü	ß
프랑스어
á	à	Á	À	é	è	É	È	ç	Ç	ê
스페인어
à	á	Á	é	É	í	Í	Ó	ó	Ú	ú	Ñ	ñ	ä	Ä

발행년	- (예 : 2010-2015)

Future Distribution Power Flow Scenario Generation Method Using Generative Adversarial Network Considering Correlation Between DERs

Conference

Ichinomiya, H.; Kawabe, K.; Chaitusaney, S.

In: 2023 IEEE Power and Energy Society Innovative Smart Grid Technologies Conference, ISGT 2023, 2023 IEEE Power and Energy Society Innovative Smart Grid Technologies Conference, ISGT 2023. (2023 IEEE Power and Energy Society Innovative Smart Grid Technologies Conference, ISGT 2023, 2023)

Full Text (IEEE) Scopus Find it@PNU

Defect detection strategies and process partitioning for single-expose EUV patterning

Academic Journal

Meli, L.; Petrillo, K.; De Silva, A.; Arnold, J.; Felix, N.; Robinson, C.; Briggs, B.; Matham, S.; Mignot, Y.; Shearer, J.; Hamieh, B.; Hontake, K.; Huli, L.; Lemley, C.; Hetzer, D.; Liu, E.; Akiteru, K.; Kawakami, S.; Shimoaoki, T.; Hashimoto, Y.; Ichinomiya, H.; Kai, A.; Tanaka, K.; Jain, A.; Choi, H.; Saville, B.; Lenox, C.

In: Journal of Micro/ Nanolithography, MEMS, and MOEMS. (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 January 2019, 18(1))

Web of Science Scopus Find it@PNU

Resist coating and developing process technology toward EUV manufacturing sub 7nm node

Conference

Kamei, Y.; Shiozawa, T.; Kawakami, S.; Shite, H.; Ichinomiya, H.; Hashimoto, Y.; Enomoto, M.; Nafus, K.; Sonoda, A.; Demand, M.; Foubert, P.

In: IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings, 2018 International Symposium on Semiconductor Manufacturing, ISSM 2018 - Proceedings. (IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings, 2 July 2018, 2018-December)

Full Text (IEEE) Scopus Find it@PNU

Visual inspection system for surface defects of transparent lenses - Detection of defects using the concentric frame difference method

Academic Journal

Kato, K.; Ioi, T.; Enomoto, S.; Ichinomiya, H.; Matsumoto, M.; Yamada, Y.

In: Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. (Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, 2000, 66(5):742-746)

Scopus Find it@PNU

Defect detection strategies and process partitioning for SE EUV patterning

Conference

Meli, L.; Petrillo, K.; De Silva, A.; Arnold, J.; Felix, N.; Robinson, C.; Briggs, B.; Matham, S.; Mignot, Y.; Shearer, J.; Hamieh, B.; Hontake, K.; Huli, L.; Lemley, C.; Hetzer, D.; Liu, E.; Akiteru, K.; Kawakami, S.; Shimoaoki, T.; Hashimoto, Y.; Ichinomiya, H.; Kai, A.; Tanaka, K.; Jain, A.; Choi, H.; Saville, B.; Lenox, C.

In: Proceedings of SPIE - The International Society for Optical Engineering, Extreme Ultraviolet (EUV) Lithography IX. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10583)

Scopus Find it@PNU

Resist coating and developing process technology toward EUV manufacturing sub-7nm node

Conference

Kamei, Y.; Shiozawa, T.; Kawakami, S.; Shite, H.; Ichinomiya, H.; Hashimoto, Y.; Enomoto, M.; Nafus, K.; Sonoda, A.; Demand, M.; Foubert, P.

In: Proceedings of SPIE - The International Society for Optical Engineering, Extreme Ultraviolet (EUV) Lithography IX. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10583)

Scopus Find it@PNU

Near-Minimum-Time Control of a Manipulator with Flexible Links

Academic Journal

Sato, O.; Shimojima, H.; Ichinomiya, H.; Saito, A.

In: Transactions of the Japan Society of Mechanical Engineers Series C. (Transactions of the Japan Society of Mechanical Engineers Series C, 1988, 54(502):1223-1229)

Open Access (JSTAGE) Scopus Find it@PNU

Technology for defectivity improvement in resist coating and developing process in EUV lithography process

Conference

Kamei, Y.; Shiozawa, T.; Kawakami, S.; Ichinomiya, H.; Enomoto, M.; Nafus, K.; Foubert, P.

In: Proceedings of SPIE - The International Society for Optical Engineering, International Conference on Extreme Ultraviolet Lithography 2017. (Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10450)

Scopus Find it@PNU

Technology for defectivity improvement in resist coating and developing process in EUV lithography process

Conference

Kamei, Y.; Shiozawa, T.; Kawakami, S.; Shite, H.; Ichinomiya, H.; Enomoto, M.; Nafus, K.; Demand, M.; Foubert, P.

In: Proceedings of SPIE - The International Society for Optical Engineering, Extreme Ultraviolet (EUV) Lithography VIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10143)

Scopus Find it@PNU

부산대학교 도서관

메일 발송