학술논문
'학술논문'
에서 검색결과 28건 | 목록
1~10
Conference
Standaert, T.; Beique, G.; Chen, H.-C.; Chen, S.-T.; Hamieh, B.; Lee, J.; McLaughlin, P.; McMahon, J.; Mignot, Y.; Mont, F.; Motoyama, K.; Nguyen, S.; Patlolla, R.; Peethala, B.; Priyadarshini, D.; Rizzolo, M.; Saulnier, N.; Shobha, H.; Siddiqui, S.; Spooner, T.; Tang, H.; van der Straten, O.; Verduijn, E.; Xu, Y.; Zhang, X.; Arnold, J.; Canaperi, D.; Colburn, M.; Edelstein, D.; Paruchuri, V.; Bonilla, G.
2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC), 2016 IEEE International. :2-4 May, 2016
Academic Journal
Bekaert, J.; De Bisschop, P.; Beral, C.; Hendrickx, E.; Van De Kerkhof, M.A.; Bouten, S.; Kupers, M.; Schiffelers, G.; Verduijn, E.; Brunner, T.A.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 October 2018, 17(4))
Academic Journal
Chen, X.; Wood, O.; Brunner, T.A.; Verduijn, E.; Capelli, R.; Hellweg, D.; Dietzel, M.; Kersteen, G.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 October 2018, 17(4))
Academic Journal
Levinson, Z.; Burbine, A.; Smith, B.W.; Verduijn, E.; Wood, O.; Goldberg, K.A.; Benk, M.P.; Wojdyla, A.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 April 2017, 16(2))
Academic Journal
Levinson, Z.; Smith, B.W.; Verduijn, E.; Wood, O.R.; Mangat, P.; Goldberg, K.A.; Benk, M.P.; Wojdyla, A.
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 April 2016, 15(2))
Academic Journal
In: Journal of Micro/ Nanolithography, MEMS, and MOEMS . (Journal of Micro/ Nanolithography, MEMS, and MOEMS, 1 April 2015, 14(2))
Academic Journal
Raghunathan, S.; Wood, O.R.; Mangat, P.; Verduijn, E.; Philipsen, V.; Hendrickx, E.; Jonckheere, R.; Goldberg, K.A.; Benk, M.P.; Kearney, P.; Levinson, Z.; Smith, B.W.
In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics . (Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 1 November 2014, 32(6))
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography XI. (Proceedings of SPIE - The International Society for Optical Engineering, 2020, 11323)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2018. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10809)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Extreme Ultraviolet (EUV) Lithography IX. (Proceedings of SPIE - The International Society for Optical Engineering, 2018, 10583)
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제한된 항목
[AR] Verduijn, E.
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