학술논문
'학술논문'
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20~30
Conference
Cheng, K.; Celik, M.; Guo, D.; Shang, H.; Haran, B.; Standaert, T.; Gupta, D.; Alptekin, E.; Hook, T.; Liu, D.; Mallela, H.; Ok, I.; Ramachandran, R.; Sardesai, V.; Scholze, A.; Seo, S.; Southwick, R.; Strane, J.; Sun, X.; Tsutsui, G.; Vega, R.; Weybright, M.; Yeh, C.; Bu, H.; Burns, S.; Canaperi, D.; Colburn, M.; Jagannathan, H.; Kanakasabaphthy, S.; Liebmann, L.; McHerron, D.; Oldiges, P.; Paruchuri, V.; Spooner, T.; Stathis, J.; Divakaruni, R.; Gow, T.; Khare, M.; Seo, K.; Bae, D.; Bae, G.; Hong, J.; Jung, J.; Kim, B.; Kim, K.; Park, Y.; Yang, W.; Chanemougame, D.; Hamieh, B.; Kim, T.; Montanini, P.; Mottura, M.; Kleemeier, W.; Sampson, R.; Cho, J.; Kambhampati, R.; Kim, H.; Nam, S.; Paul, A.; Prindle, C.; Tripathi, N.; Xie, R.; Iacoponi, J.; Jenq, J.
In: Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014 . (Proceedings - 2014 IEEE 12th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2014, 23 January 2014)
Conference
Hamieh, B.; Moreau, D.; Guo, W.; Meiring, J.; Thomas, A.; Wei, A.; McIntyre, G.; Choi, H.C.; Erenturk, B.; Hamouda, A.; Liu, H.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXVI. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8683)
Conference
Mehta, S.S.; Chauhan, V.; Wandel, J.; Sun, Y.Y.; Kelling, M.; Kim, J.S.; Cantone, J.; Xu, Y.; Chen, J.; Tseng, C.; Koay, C.-S.; Yin, Y.; Horak, D.; Chen, S.-T.; Colburn, M.; Arnold, J.; Spooner, T.; Landie, G.; Hamieh, B.; Mignot, Y.; Loquet, Y.; Burns, S.D.; Lawson, P.; Glodde, M.; Thomas, A.; Burkhardt, M.; Kato, H.; Matsui, Y.; Huli, L.; Hetzer, D.; Kawakami, S.; Dunn, S.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Resist Materials and Processing Technology XXIX. (Proceedings of SPIE - The International Society for Optical Engineering, 2012, 8325)
Conference
Augur, R.; Child, C.; Ahn, J.H.; Tang, T.J.; Clevenger, L.; Kioussis, D.; Masuda, H.; Srivastava, R.; Oda, Y.; Oguma, H.; Quon, R.; Kim, B.; Sheng, H.; Hirooka, S.; Gupta, R.; Thomas, A.; Singh, S.M.; Fang, Q.; Schiwon, R.; Hamieh, B.; Wornyo, E.; Allen, S.; Kaltalioglu, E.; Fryxell, T.; Ogino, A.; Shimada, E.; Aizawa, H.; Minda, H.; Kim, S.O.; Oki, T.; Fujii, K.; Pallachalil, M.; Takewaki, T.; Hu, C.K.; Sundloff, B.; Permana, D.; Bolom, T.; Engel, B.; Labelle, C.; Sapp, B.; Shobha, H.; Gates, S.; Ryan, E.T.; Bonilla, G.; Daubenspeck, T.; Shaw, T.; Osborne, G.; Grill, A.; Edelstein, D.; Restaino, D.; Molis, S.; Spooner, T.; Ferreira, P.; Biery, G.; Sampson, R.
In: Advanced Metallization Conference (AMC) , Advanced Metallization Conference 2010. (Advanced Metallization Conference (AMC), 2010, :41-42)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXII. (Proceedings of SPIE - The International Society for Optical Engineering, 2009, 7274)
Conference
In: 2007 Proceedings - 24th International VLSI Multilevel Interconnection Conference, VMIC 2007 , 2007 Proceedings - 24th International VLSI Multilevel Interconnection Conference, VMIC 2007. (2007 Proceedings - 24th International VLSI Multilevel Interconnection Conference, VMIC 2007, 2007, :456-459)
Conference
In: 2007 Proceedings - 24th International VLSI Multilevel Interconnection Conference, VMIC 2007 , 2007 Proceedings - 24th International VLSI Multilevel Interconnection Conference, VMIC 2007. (2007 Proceedings - 24th International VLSI Multilevel Interconnection Conference, VMIC 2007, 2007, :169-172)
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[AR] Hamieh, B.
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