학술논문
'학술논문'
에서 검색결과 13건 | 목록
1~10
Periodical
Capodieci, Luigi; Cain, Jason P.; Simiz, J.-G.; Hasan, T.; Staals, F.; Le-Gratiet, B.; Tel, W. T.; Prentice, C.; Gemmink, J.-W.; Tishchenko, A.; Jourlin, Y.
Proceedings of SPIE; March 2016, Vol. 9781 Issue: 1 p97810S-97810S-11, 9683202p
Periodical
Bekaert, J.; Van Look, L.; Vandenberghe, G.; van Adrichem, P.; Maslow, M. J.; Gemmink, J.-W.; Cao, H.; Hunsche, S.; Neumann, J. T.; Wolf, A.
Proceedings of SPIE; March 2011, Vol. 7973 Issue: 1 p79730V-79730V-11, 7893282p
Conference
Lakcher, A.; Le-Gratiet, B.; Ducoté, J.; Fanton, P.; Kiers, T.; Gemmink, J.-W.; Hunsche, S.; Prentice, C.; Besacier, M.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXXI. (Proceedings of SPIE - The International Society for Optical Engineering, 2017, 10145)
Conference
Simiz, J.-G.; Le-Gratiet, B.; Tishchenko, A.; Jourlin, Y.; Staals, F.; Tel, W.T.; Gemmink, J.-W.; Prentice, C.; Hasan, T.
In: Proceedings of SPIE - The International Society for Optical Engineering , Design-Process-Technology Co-Optimization for Manufacturability X. (Proceedings of SPIE - The International Society for Optical Engineering, 2016, 9781)
Conference
Van Look, L.; Bekaert, J.; D'Havé, K.; Laenens, B.; Vandenberghe, G.; Cheng, S.; Schreel, K.; Gemmink, J.-W.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2011, 7973)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Design for Manufacturability through Design-Process Integration II. (Proceedings of SPIE - The International Society for Optical Engineering, 2008, 6925)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XX. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6520(PART 2))
Conference
Benndorf, M.; Gemmink, J.-W.; Warrick, S.; Conley, W.; Cruau, D.; DeSimone, D.; Mestadi, K.; Farys, V.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XX. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6520(PART 1))
Conference
Warrick, S.; Conley, W.; Jovanovic, D.; Farys, V.; Trouiller, Y.; Gouraud, P.; Benndorf, M.; Gemmink, J.-W.; Belledent, J.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XX. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6520(PART 1))
Conference
Warrick, S.; Conley, W.; Barr, A.; Lucas, K.; Cruau, D.; Gomez, J.-M.; Morton, R.; Belledent, J.; Plantier, V.; Gemmink, J.-W.; Mauri, A.; Chapon, J.-D.; Monget, C.; Sicurani, E.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XIX. (Proceedings of SPIE - The International Society for Optical Engineering, 2006, 6154 I)
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[AR] Gemmink, J.-W.
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