학술논문
'학술논문'
에서 검색결과 79건 | 목록
40~50
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XXV. (Proceedings of SPIE - The International Society for Optical Engineering, 2012, 8326)
Conference
Dufaye, F.; Gough, S.; Sundermann, F.; Charras, N.; Brochard, C.; Thivolle, N.; Sartelli, L.; Pogliani, C.; Miyashita, H.; Hidenori, Y.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask and Next-Generation Lithography Mask Technology XVIII. (Proceedings of SPIE - The International Society for Optical Engineering, 2011, 8081)
Conference
Dufaye, F.; Gough, S.; Sundermann, F.; Farys, V.; Miyashita, H.; Sartelli, L.; Perissinotti, F.; Buttgereit, U.; Perlitz, S.; Birkner, R.
In: Proceedings of SPIE - The International Society for Optical Engineering , 26th European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2010, 7545)
Conference
Le Gratiet, B.; Sundermann, F.; Massin, J.; Decaux, M.; Thivolle, N.; Baron, F.; Ostrovsky, A.; Monget, C.; Chapon, J.D.; Blancquaert, Y.; Dabertrand, K.; Thevenon, L.; Bry, B.; Cluet, N.; Borot, B.; Bingert, R.; Devoivre, T.; Gourard, P.; Babaud, L.; Buttgereit, U.; Birkner, R.; Joyner, M.; Graitzer, E.; Cohen, A.
In: Proceedings of SPIE - The International Society for Optical Engineering , Metrology, Inspection, and Process Control for Microlithography XXIV. (Proceedings of SPIE - The International Society for Optical Engineering, 2010, 7638)
Conference
Audran, S.; Vaillant, J.; Farys, V.; Hirigoyen, F.; Huss, E.; Mortini, B.; Cowache, C.; Berthier, L.; Mortini, E.; Fantuz, J.; Arnaud, O.; Depoyan, L.; Sundermann, F.; Baron, C.; Reynard, J.-P.
In: Proceedings of SPIE - The International Society for Optical Engineering , Advances in Resist Materials and Processing Technology XXVII. (Proceedings of SPIE - The International Society for Optical Engineering, 2010, 7639)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , 25th European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2009, 7470)
Conference
Perissinotti, F.; Sartelli, L.; Miyashita, H.; Chiu, M.-C.; Liu, Y.-C.; Chung, H.-C.; Sundermann, F.; Gough, S.; Tourniol, S.; Dufaye, F.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2009. (Proceedings of SPIE - The International Society for Optical Engineering, 2009, 7488)
Conference
Trouiller, Y.; Borjon, A.; Belledent, J.; Couderc, C.; Rody, Y.; Cam, L.L.; Farys, V.; Sundermann, F.; Urbani, J.-C.; Planchot, J.; Goirand, P.-J.; Robert, F.; Kerrien, G.; Vautrin, F.; Martinelli, C.; Gardin, C.; Conley, W.; Warrick, S.; Wilkinson, B.; Saied, M.; Yesilada, E.; Montgomery, P.
In: Proceedings of SPIE - The International Society for Optical Engineering , Optical Microlithography XX. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6520(PART 1))
Conference
Saied, M.; Yesilada, E.; Gardin, C.; Wilkinson, B.; Morgana, N.; Foussadier, F.; Urbani, J.C.; Sundermann, F.; Robert, F.; Vautrin, F.; Kerrien, G.; Planchot, J.; Martinelli, C.; Farys, V.; Belledent, J.; Couderc, C.; LeCam, L.; Rody, Y.; Borjon, A.; Trouiller, Y.; Di-Maria, J.-L.; Schanen, I.
In: Proceedings of SPIE - The International Society for Optical Engineering , Photomask Technology 2007. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6730)
Conference
In: Proceedings of SPIE - The International Society for Optical Engineering , EMLC 2007: 23rd European Mask and Lithography Conference. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6533)
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제한된 항목
[AR] Sündermann, F.
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